Trans.JSME(C)
 1999
DOI: 10.1299/kikaic.65.4496
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Deposition and Microtrribology of Carbon Nitride and Boron Nitride Super Lattice Films.

Shojiro Miyake1,
Yukio Sekine2,
Shuichi Watanabe3
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“…7 に示す．1 nm 膜 厚のカーボンと BN の境界部に Fig. 8 に示すように0.6 nm 程度の組成傾斜部が摩擦振幅の差として検出される．これは 膜形成時のターゲットの切り替え時間と対応している．この 境界部の傾斜構造に起因して欠陥進展の抑止効果が変化する ことが明らかになっている13,14) ．…”
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Creation of Solid Lubricant Firms by Nanostructure Control

Miyake1
2015
J. Vac. Soc. Jpn.
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“…7 に示す．1 nm 膜 厚のカーボンと BN の境界部に Fig. 8 に示すように0.6 nm 程度の組成傾斜部が摩擦振幅の差として検出される．これは 膜形成時のターゲットの切り替え時間と対応している．この 境界部の傾斜構造に起因して欠陥進展の抑止効果が変化する ことが明らかになっている13,14) ．…”
unclassified

Creation of Solid Lubricant Firms by Nanostructure Control

Miyake1
2015
J. Vac. Soc. Jpn.
Self Cite
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0
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Deposition and Tribology of Carbon and Boron Nitride Super Lattice Solid Lubricant Films

Miyake
1
,
Sekine
2
,
Watanabe
3
2004
JSME Int. J., Ser. C
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