Deposition and Nanotribological Characterization of Sub-100-nm Thick Protective Ti-Based Coatings for Miniature Applications

Abstract

Ti-based protective thin films with thicknesses below 100 nm, intended for miniature applications were deposited using physical vapor deposition magnetron sputtering. X-ray diffraction (XRD), scanning electron microscopy, and atomic force microscopy were employed for the assessment of microstructure, morphology, film thickness, surface topography, and roughness. XRD pattern showed the formation of f.c.c TiN, TiCN, and TiC phases with different preferred orientations for films prepared in Ar/N 2 , Ar/N 2 ? C 2 H 2 , and Ar/C 2 H 2 gas mixtures, respectively. Nanotribological performance was investigated using multipass nanoscratch technique at variable applied normal loads (100-400 lN). The nanoscale coefficient of friction was found to be in the 0.08-0.1 range, a sufficiently low value showing the potential of these films for miniature applications, such as microelectromechanical systems. The nanowear resistance at mean contact pressures in the range of 5-8.5 GPa for each sample was evaluated in terms of the average residual wear depth and an abrasive-dominated wear mechanism was found.

Effect of ytterbium on hardness and color of titanium nitride thin films

“…Transition-metal nitrides have attracted substantial attention as hard coatings because of their remarkable properties, which include high hardness, [1][2][3][4][5][6][7] good thermochemical stability, 8,9) and good wear resistance. 10,11) Among the transition-metal nitrides, titanium nitride (TiN) stands out for its exceptional characteristics.…”

Thickness Influence on In Vitro Biocompatibility of Titanium Nitride Thin Films Synthesized by Pulsed Laser Deposition

“…Its excellent physical and chemical properties, which can be varied in a broad range [4,5], have generated great interest and have been exploited in the field of hard and protective coatings [6,7,8,9]. We note that TiN presents good wear and corrosion resistance properties when used in physiological environments [10,11].…”

“…Titanium nitride (TiN) is a well-known, extremely hard, biocompatible ceramic material [ 2 ]; moreover, it possesses high electron conductivity and mobility, as well as a high melting point [ 3 ]. Its excellent physical and chemical properties, which can be varied in a broad range [ 4 , 5 ], have generated great interest and have been exploited in the field of hard and protective coatings [ 6 , 7 , 8 , 9 ]. We note that TiN presents good wear and corrosion resistance properties when used in physiological environments [ 10 , 11 ].…”

Solvent-free ionic molybdenum disulphide (MoS2) nanofluids

“…The nanoscale coefficient of friction was found to be in the range of 0.1-0.14, which is quite low. 29 The scratches under different normal loads are presented in Fig. 1S in the ESI.…”