1996
DOI: 10.1016/0257-8972(95)02698-3
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Deposition and properties of carbon-based amorphous protective coatings

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Cited by 20 publications
(14 citation statements)
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“…[51,53] Similar results were obtained by Corbella et al [54,55] For hydrocarbon plasmas, it could be demonstrated that mainly plasma chemistry affects the deposited mass over a broad parameter range yielding dense barrier coatings. [49,[56][57][58][59] Despite the fact that the same apparent activation energy is obtained for both experimental series shown in Figure 3, the actual mass deposition rate per monomer flow is seen to vary with the actual C 2 H 4 flow rate. While the absolute mass deposition rate R m for the higher flow is still higher, R m /F is noticeably reduced.…”
Section: à5mentioning
confidence: 80%
“…[51,53] Similar results were obtained by Corbella et al [54,55] For hydrocarbon plasmas, it could be demonstrated that mainly plasma chemistry affects the deposited mass over a broad parameter range yielding dense barrier coatings. [49,[56][57][58][59] Despite the fact that the same apparent activation energy is obtained for both experimental series shown in Figure 3, the actual mass deposition rate per monomer flow is seen to vary with the actual C 2 H 4 flow rate. While the absolute mass deposition rate R m for the higher flow is still higher, R m /F is noticeably reduced.…”
Section: à5mentioning
confidence: 80%
“…In the past it was already shown that atmospheric-pressure DBD-based PACVD processes can yield plasma polymers with high retention of the monomer structure, if precursors are used which are able to polymerize via a radical mechanism such as acrylic acid or glycidyl methacrylate, providing surfaces with electrophilic carboxy and epoxy groups, resp. [1,2]. In the meantime, many more monomers have been investigated and in many cases a high chemical selectivity of the deposition was found.…”
Section: Surface Functionalization Using Atmospheric-pressure Dielectmentioning
confidence: 98%
“…Reducing the bias voltage whilst maintaining the precursor ratio produces a film which shows further reduction in degradation by NaOH ( figure 3 d), however, the aluminium transfer through the film appears to be increased, table 1. This may be related to a reduction in microscopic pinholes defects with reduced bias which will reduce corrosion [19,20], but the polymer-like nature of the film and reduction in density from around 1.9 gcm -3 to approximately 1.4 gcm -3 may reduce the barrier efficacy [10,12].…”
Section: Jones Et Al Diamond-like Carbon Coating Of Alternative Metamentioning
confidence: 99%
“…Control of PECVD deposition parameters affects the sp 2 / sp 3 ratio, hydrogen content and clustering of sp 2 sites, leading to film properties that can range from polymer-like to diamond-like [12]. Substrate treatment and interlayers have an effect on film adhesion, integrity, wear and corrosion properties [13,14]; incorporation of species such as N, O, F, Ar and Si within the film have been shown to affect the coating properties, including surface energy, topography, defect density, diffusion barrier efficacy and biomedical compatibility [10,[15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%
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