Deposition Angle Dependence of Tantalum Oxide Nanolayers on the Structural and Optical Properties as a Function of Thickness

Abstract

Tantalum oxide nanolayers with different thicknesses (30, 60, 90 and 120[Formula: see text]nm) were deposited on glass substrates at a deposition angle of 60∘ under high vacuum condition at room temperature by using electron gun evaporation method. The morphological, structural and optical properties of tantalum oxide nanolayers are investigated by XRD, FESEM, EDX, AFM and spectrophotometer. Kramers–Kronig relations are used to calculate the optical parameters. Optical results show that the real and imaginary parts of the dielectric function, the real part of the refractive index and bandgap energy have increased with increasing film thickness.