Deposition of Alumina Films on Interdigital Transducer/ZnO/Glass Substrates by Electron Beam Evaporation to Improve the Characteristics of Surface Acoustic Wave Devices

Shih, Wen–Ching; Lu, Chih-Hsuan; Wu, Mu–Shiang

doi:10.1080/00150193.2015.996047

Cited by 2 publications

(2 citation statements)

References 27 publications

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“…In our previous study, we studied the SAW properties of interdigital transducer (IDT)=ZnO=Al 2 O 3 =glass, 26) ZnO=IDT=Al 2 O 3 =glass, 27) and Al 2 O 3 =IDT=ZnO=glass layered SAW devices. 28) The phase velocity and coupling coefficient of the SAW device were apparently increased when we increased the thickness of alumina film. [26][27][28] Besides, an excellent temperature coefficient of the frequency of the SAW device was obtained with increasing thickness of the alumina film.…”

Section: Introductionmentioning

confidence: 92%

“…28) The phase velocity and coupling coefficient of the SAW device were apparently increased when we increased the thickness of alumina film. [26][27][28] Besides, an excellent temperature coefficient of the frequency of the SAW device was obtained with increasing thickness of the alumina film. 26,27) It is a possible alternative for a sapphire substrate for highfrequency SAW device applications.…”

Section: Introductionmentioning

confidence: 92%

See 1 more Smart Citation

Improving the properties of zinc oxide thin-film surface acoustic wave device on glass substrate by introducing double alumina layers

Shih¹,

Huang²,

Wu³

2017

Jpn. J. Appl. Phys.

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ZnO films with c-axis (0002) orientation have been successfully grown by RF magnetron sputtering on Al2O3/glass substrates. The alumina films were firstly deposited on glass substrates, and then secondly deposited on interdigital transducer/ZnO film/alumina film/glass substrates by electron beam evaporation. The crystalline structure and surface roughness of the films were investigated by X-ray diffraction and atomic force microscopy, respectively. The phase velocity and coupling coefficient of the surface acoustic wave (SAW) device were both increased when we deposited the double alumina layers. On the other hand, the temperature coefficient of frequency becomes better if we increase the thickness of the lower alumina film. The experimental result is beneficial for improving the performance of the ZnO thin-film SAW devices on inexpensive glass substrates.

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