Deposition of boron-containing coatings by electron-beam evaporation of boron-containing targets

Yushkov, Yu. G.; Окс, Е. М.; Tyunkov, A.V.; Corbella, Carles; Zolotukhin, Denis B.

doi:10.1016/j.ceramint.2019.10.179

Cited by 19 publications

(12 citation statements)

References 24 publications

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“…The duration of the entire process was 5 to 20 min depending on the target composition (B or BN). Simultaneously with the deposition of coatings, it was possible to monitor the mass-to-charge composition of the beam plasma using a modified RGA-300 quadrupole mass-spectrometer [139,140]. Figure 30 shows photographs of the obtained boron-based coatings at different electron-beam power densities, and the distribution of micro-hardness with the depth of the coatings deposited during evaporation of boron and boron nitride in different gases.…”

Section: Boron-containing Coatingsmentioning

confidence: 99%

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Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

et al. 2022

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This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.

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Section: Boron-containing Coatingsmentioning

confidence: 99%

“…Photographs of boron-based coatings at different electron-beam power densities:(a) 30 kW/cm 2 ; (b) 25 kW/cm 2 ; (c) 20 kW/cm 2 ; (d) 15 kW/cm 2 . Graphs[139] represent a microhardness of boron-containing coatings vs. depth during evaporation of boron in helium (e), oxygen (f), nitrogen (g), and of boron nitride in the residual atmosphere (h).…”

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confidence: 99%

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

et al. 2022

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“…The great advantage of this method is the possibility of carrying out the boronizing process locally on the selected surface of machine element [21,26,27]. In [28], Yushkov et al used electron-beam evaporation of boron-containing targets for boriding. The obtained coating thickness was 3-4 µm.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Wear Resistance of Borided Steel C45

2020

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The wear resistance of diffusion coatings in conditions of specific pressures of 3, 7 and 10 MPa was studied. The boride coatings were prepared by means of diffusion methods using C45 steel as the substrate material. Research on the microstructure and redistribution of chemical elements on wear surface of a borided layer was carried out. It was found that the boride coatings should be used under a specific pressure of 7 MPa. It was found that the wear of friction couple coating of steel C45 under specific pressure of 3 MPa proceeds according to the oxidation wear mechanism, while under specific pressures of 7 and 10 MPa the abrasive wear prevails. The wear-induced segregation of atoms in coatings was studied using secondary mass-spectroscopy method (SIMS). Increased C, O, and B concentrations were noticed at the wear surface on depth from 50 to 2000 Å. The secondary wear-induced structure formation on the wear surface resulted in high wear resistance of diffusion borided coatings.

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“…[ 12 ] However, with boron, the electron‐beam approach is hampered by the low electrical conductivity of boron, which in vacuum results in charging up of the target and even reflection of the electron beam. However, as we have shown in prior works, [ 13,14 ] dense boron‐containing plasma can be generated and used for coating deposition by electron‐beam evaporation of a boron‐containing target in medium vacuum (at pressure about 10 Pa) by a powerful continuous focused electron beam from a forevacuum pressure plasma‐cathode electron source. In the forevacuum pressure range, efficient heating and high evaporation rates of low conductivity targets can be attained via neutralization of target surface charging by ions of the plasma formed from the working gas by the electron beam in the vicinity of the target (the “beam plasma”).…”

Section: Introductionmentioning

confidence: 99%

Ion composition of a multicomponent beam plasma formed by electron‐beam evaporation of a boron‐containing target in medium vacuum

Yushkov

Окс

Tyunkov

et al. 2020

Plasma Processes & Polymers

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Thin boron and boron nitride films are applied in microelectronics due to their high hardness and strength, and low electrical conductivity. However, methods for fabrication of such films are limited. One promising method is electron‐beam evaporation of a boron‐containing target to form a boron‐containing plasma. In this study, we describe our investigations of the ion mass‐to‐charge composition of the multicomponent plasma generated by heating and evaporation of boron or boron nitride targets by a continuous electron beam in a helium or nitrogen atmosphere at medium vacuum pressure (about 10 Pa). We show that at beam power sufficient for intense evaporation of the boron target, there is an increase in the mass fraction of boron ions in the plasma. For the case of evaporation of a boron nitride target, the deposited coating contains both boron and nitrogen, implying incomplete dissociation of boron nitride molecules in the evaporation process. The results of our study demonstrate the utility of electron‐beam evaporation of high melting point binary compounds in medium vacuum for coating deposition.

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Deposition of boron-containing coatings by electron-beam evaporation of boron-containing targets

Cited by 19 publications

References 24 publications

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

Analysis of Wear Resistance of Borided Steel C45

Ion composition of a multicomponent beam plasma formed by electron‐beam evaporation of a boron‐containing target in medium vacuum

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