Deposition of buffer layers for MOCVD of Y1Ba2Cu3O7−x on GaAs

Musolf, J.; Boeke, E.; Waffenschmidt, Eberhard; He, Xiliang; Heuken, M.; Heime, K.

doi:10.1016/0925-8388(93)90743-7

Cited by 11 publications

(9 citation statements)

References 3 publications

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“…Magnesium oxide (MgO) thin films have attracted great scientific and technological interest in recent decades because of high MgO chemical and thermal stability (melting point = 2900 °C), a wide band gap (7.2 eV), and a low dielectric constant (9.8) and refractive index, as well as excellent thermal conductance and diffusion barrier properties . This material has often been used for the production of protective coatings of dielectrics , and as buffer layers for superconducting or perovskite ferroelectric thin films. − …”

Section: Introductionmentioning

confidence: 99%

Stability Study of a Magnesium β-Diketonate As Precursor for Chemical Vapor Deposition of MgO

Sartori¹,

Habra

Bolzan³

et al. 2011

Chem. Mater.

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On the basis of the study of the thermal behavior of [Mg(tmhd)2(TMEDA)] (1; tmhd =2,2,6,6-tetramethyl-3,5-heptanedionate; TMEDA = N,N,N′,N′-tetramethylethylenediamine), a novel procedure for magnesium oxide thin film growth has been developed for chemical vapor deposition (CVD) applications. Complementary studies (thermogravimetric measurements and IR and NMR spectroscopy) enabled revelation of the dissociation of TMEDA from 1, confirmed by the detection of both free TMEDA in the vapor phase and less volatile [Mg2(tmhd)4] (2) as a residue after sublimation. The effect of this dissociation is an unwanted changeable sublimation rate of the precursor 1 during the CVD process. The endeavor of a constant deposition rate by simultaneously exploiting the good volatility of 1 was achieved through its synthesis in situ by using 2 with a diamine enriched carrier. Laser reflectance interferometry (LRI) measurements testified that such a method ensured a good and constant deposition rate throughout the growth experiment, independently of the adopted processing conditions. In addition, X-ray diffraction (XRD) measurements revealed the obtainment of textured and polycrystalline MgO coatings on sapphire and on Si(100). The system chemical composition was investigated by X-ray photoelectron spectroscopy (XPS).

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Section: Introductionmentioning

confidence: 99%

Stability Study of a Magnesium β-Diketonate As Precursor for Chemical Vapor Deposition of MgO

Sartori¹,

Habra

Bolzan³

et al. 2011

Chem. Mater.

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“…In addition, ZnEt 2 shows undesired pre-reactions and hence decomposition by the deposition of particulates, upstream from the heating element may occur during the precursor delivery. 32,39,43 For MgO lm formation, bis(cyclopentadienyl) magnesium, 25,44 alkylmagnesium alkoxides, 45,46 magnesium carboxylates, 47,48 magnesium b-ketoiminates, 49 magnesium bdiketonates 26 and their diamine adducts 12,50,51 are usually used as CVD precursors of which the latter ones are promising CVD candidates, due to their high volatility, good stability in the condensed and gas phase, and their straightforward synthetic procedure. 12,50,51 In contrast, as spin-coating precursors mainly magnesium acetate tetrahydrate or zinc acetate dihydrate were used for the formation of the respective metal oxide layers.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Mg and Zn diolates and their use in metal oxide deposition

et al. 2019

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“…MgO is an important metal oxide dielectric material used as a buffer layer in superconductor and ferroelectric materials [11][12][13]. Due to its absorption property, this material attracts its use as humidity sensors [14].…”

Section: Introductionmentioning

confidence: 99%

Effect of solvent and annealed temperature on band gap energies of MgO nanoparticles

Selvi

Mangai

Priya

et al. 2014

2014 International Conference on Science Engineering and Management Research (ICSEMR)

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Novel two-dimensional nanostructures of magnesium oxide nanoparticles were synthesized by simple reflux method by changing the solvent and annealing temperature. The structural and surface morphology were investigated using X-ray diffraction spectra and High-resolution scanning electron microscopy (HR-SEM). The XRD spectrum showed that the synthesized MgO samples are pure cubic MgO. The HR-SEM picture showed that the MgO nanoparticle prepared with ethanol as a solvent gives different morphologies such as nanoflakes, nanoflowers and nanosheet at low temperature. At high temperature, the flake shape changes into spherical shape. The micro strain is calculated using Williamson-Hall plot method. The optical properties of synthesized MgO nanoparticle studied by using UV-Visible and Photoluminescence (PL) spectra. UV emission and a broad visible emission band in photoluminescence (PL) spectra further demonstrates that the potential applications of the material in optoelectronics. The particle size, morphology and band gap of the synthesized MgO nanoparticle is highly influenced by the solvent and annealing temperature.

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Deposition of buffer layers for MOCVD of Y1Ba2Cu3O7−x on GaAs

Cited by 11 publications

References 3 publications

Stability Study of a Magnesium β-Diketonate As Precursor for Chemical Vapor Deposition of MgO

Stability Study of a Magnesium β-Diketonate As Precursor for Chemical Vapor Deposition of MgO

Synthesis of Mg and Zn diolates and their use in metal oxide deposition

Effect of solvent and annealed temperature on band gap energies of MgO nanoparticles

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