The formation of aluminide coatings on Ni, Inconel 738, NiCr23Fe, SS304 and ARMCO Fe by a Fluidised Bed Chemical Vapour Deposition (FBCVD) process at low temperatures (550-650°C) was studied. Aluminium powder and a HCI activator were used to form precursor halide vapours of AI. This led to the aluminide coating formation on the substrate's surface. The examination of the treated samples by means of optical microscopy and SEM/EDX indicated the deposition of dense and homogeneous coatings over the entire surface even for small treatment times. Coating thickness growth and coating morphology were evaluated for various treatment times and temperatures. The low temperature process has advantages compared to the high temperature process since the mechanical properties of the treated parts are not affected, although the coating thicknesses achieved are smaller.