Deposition of crystalline C–N film by arc evaporation process

Crystalline carbon nitride film synthesized by ion beam assisted magnetron sputtering and thermal annealing in nitrogen gas

“…However, the formation of high pure crystalline β-C3N4 is not confirmed yet. In most cases, the grown carbon nitride films were seriously nitrogen deficient compared with stoichiometric β-C 3 N 4 [11][12][13][14][15][16][17][18][19][20]. It is still a challenging topic for preparing carbon nitride films with high crystallinity and high nitrogen content by experimental method.…”