Deposition of diamond from the jet activated in the microwave discharge of gases

Abstract

The present work is devoted to a numerical and experimental investigation of the effect of conditions of methane decomposition on the growth of diamond structures during gasjet deposition. The results of experiments on the diamond gas-jet synthesis from methane and hydrogen mixture flows are presented. The direct simulation Monte Carlo method in cylindrical geometry for numerical analysis of these experiments is applied. A one-dimensional approach based on the solution of equilibrium chemical kinetics equations is used to analyze gas-phase methane decomposition. The conducted research has shown that at a decrease in methane decomposition time in the absence of high temperatures of the fed mixture it is possible to receive higher rates of growth of diamond structures. The obtained results can be useful for optimization of gas-dynamic sources of activated gas diamond synthesis.