Deposition of diamond-like carbon films using plasma based ion implantation with bipolar pulses

Surface & Interface Analysis

Ikeyama

et al. 2008

In the present study, the effect of deposition pressure on the deposition rate and various properties of diamond-like carbon (DLC) coatings were investigated. The DLC coatings were deposited on Si substrates using a bipolar-type plasma-based ion implantation and deposition plasma based ion implantation and deposition (PBIID) technique. The toluene was used as a source gas and the deposition pressure ranged from 0.03 to 2.0 Pa. The deposition rate of the DLC coatings increases about 12 times as the deposition pressure is changed from 0.03 to 2.0 Pa. Also, the surface roughness increases with increasing deposition pressure due to high deposition rate. The hardness and elastic modulus decrease when the deposition pressure exceed 0.7 Pa due to the remarkable growth of graphitic islands. The corrosion protection performance of the DLC coating deposited at 2.0 Pa is superior to that of the DLC coating deposited at 0.2 Pa for the same deposition time of 1 h. The high deposition pressure for the DLC coating is effective in improvement of corrosion protection properties.

Section: Methodsmentioning

confidence: 99%

Effect of deposition pressure on the properties of DLC coatings deposited by bipolar‐type PBII&D

Choi

Surface & Interface Analysis

Ikeyama

et al. 2008

“…Working pressure was kept 0.2 Pa. Deposition time was changed from 30 to 240 min. More details about the experimental setup have been described previously [5]. After the deposition, the compositional analysis of DLC films prepared on Si substrates was performed using a 1.7MV tandem-type ion accelerator [6].…”

Section: Methodsmentioning

confidence: 99%

“…In addition, the microstructure of the film is possible to control by ion bombardment caused by negative pulse bias voltage [3,4]. In this study, DLC films are prepared by a bipolar-type PBII method [5] and the mechanical properties related to the microstructure or structural changes are examined by wear test and Raman spectroscopy as a function of negative pulse voltages (V n ).…”

mentioning

confidence: 99%

Wear test and Raman analysis of diamond-like carbon films prepared by bipolar-type plasma based ion implantation

Trans. Mat. Res. Soc. Japan

Terayama²,

Ueda³

et al. 2011

Diamond-like carbon (DLC) films are prepared on hard metal (WC-Co) substrates by a bipolar-type plasma based ion implantation. The mechanical properties and structural changes are examined by wear test and Raman spectroscopy as a function of negative pulse voltages (V n ) in the range of -5 to -15 kV. It is found that friction coefficient is around 0.2 for each sample. However, lower V n causes better endurance (longer steady wear distance). Raman measurements reveal that the microstructure is changed to graphite-like structure after wear test. It is assumed that the degree of graphitization is larger as V n increases.

“…1. Details of the system were described in a previous paper [4]. The deposition conditions of the Si-DLC coatings are as follows; processing gas: a mixture of tetramethylsilane (Si(CH 3 ) 4 ) and toluene, posi- Figure 1 Schematic diagram of bipolar-type PBII&D for the deposition of Si-DLC coatings.…”

Section: Methodsmentioning

confidence: 99%

Effect of oxygen plasma treatment on the tribological properties of Si‐DLC coatings

Choi

Phys. Status Solidi (c)

Ikeyama

et al. 2008

In the present study, the effects of silicon oxide layer of Si‐DLC coatings on the tribological properties were investigated. The Si‐DLC coatings were deposited on Si substrates using a bi‐polar type plasma‐based ion implantation and deposition technique (bi‐polar type PBII&D), and the surface of the Si‐DLC coating was treated by oxygen plasma for 180 seconds. The friction coefficient of the Si‐DLC coatings is effectively reduced due to the treatment of oxygen plasma whereas the wear depth of oxidized Si‐DLC coatings increases due to the wear of soft oxide layer. A transferred layer composed of silicon oxide and graphitic carbon was observed on the counter steel ball surface, and the amount of the transferred layer increases by the treatment of oxygen plasma. The transferred layer prevents contact between the steel and DLC surfaces when sliding, resulting in a low friction coefficient. It seems that the silicon oxide plays a roll to bind the lubricative graphitized carbon debris on the steel ball surface. The treatment of the oxygen plasma on the top surface of the Si‐DLC coatings can effectively reduce the friction coefficient without hardness reduction in the entire Si‐DLC coatings. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)