Deposition of diamond structures from interacting gas jets

Emel’yanov, A. A.; Ребров, А. К.; Yudin, I. B.

doi:10.1134/s1063784216120124

Cited by 19 publications

(7 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…All considered models significantly overestimate the experimental data for the growth rate (11 µm/h [6]), therefore, the presented rates are normalized to their mean values along the substrate. Figs.…”

Section: Resultsmentioning

confidence: 99%

“…In [6] the conditions which lead to a high growth rate of diamond (up to 11 µm/h) and dependence of the growth rate on the distance from the substrate to an atomic hydrogen generation zone have been ascertained. Simulation of corresponding growth process within a simple model (only adsorption reactions were considered) have shown [1] that the dependence of the growth rate from the distance of the substrate from the generation (hot) zone correlates with the CH 2 radical concentration, but not with the CH 3 .…”

Section: Problem Statementmentioning

confidence: 99%

See 1 more Smart Citation

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Leshchev

Gorbachev²

2019

EPJ Web Conf.

View full text Add to dashboard Cite

Three models for diamond growth process by the chemical vapor deposition of methane are proposed. They differ in the degree of detail of the surface reaction description. The most complete model contains the reactions of deposition, etching and insertion. Gas-dynamic simulations have been performed for all those models. The species delivery to the substrate and the contribution from different species to the growth process is analysed. It is shown that different surface reaction models lead to different profiles of the species concentrations in the immediate vicinity of the substrate, thus, the experimental data on the growth rate may give information on the growth mechanism.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Problem Statementmentioning

confidence: 99%

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Leshchev

Gorbachev²

2019

EPJ Web Conf.

View full text Add to dashboard Cite

show abstract

“…When the initial gas flow is activated on an extended high-temperature surface, multiple collisions lead to deep dissociation of hydrogen and decomposition of methane. This concept was realized in [3][4][5][6][7].…”

Section: Methodsmentioning

confidence: 99%

“…The detailed description of this reactor ( Figure 1) is presented in [7]. The experiments were performed under the following conditions: the pressure in chamber was 20 Torr, and temperatures of the tungsten tube, substrate, and tungsten capillary were 2400, 1300, and about 2400 K, respectively.…”

Section: Methodsmentioning

confidence: 99%

Synthesis of diamond structures from the coaxial flows of Н₂and Н₂+СН₄mixture

2017

View full text Add to dashboard Cite

Abstract. The work presents the results of experiments on the diamond gas-jet synthesis from methane and hydrogen mixture, flowing from coaxial channels under the following conditions: temperature of the hydrogen activating surface of 2400 K, pressure in the deposition chamber of 20 Torr, different gas fluxes, and different CH 4 concentrations. The Direct Simulation Monte Carlo method for numerical analysis of experiments was applied.

show abstract

“…The chamber is initially filled with molecular hydrogen with background pressure P = 0, 2 and 20 Torr. Such conditions correspond to typical experiments on gas-jet deposition of diamond-like films [17][18][19].…”

Section: Numerical Experimentsmentioning

confidence: 99%

Modeling the flow of activated H₂+ CH₄mixture by deposition of diamond nanostructures

2017

View full text Add to dashboard Cite

Abstract. Algorithm of the direct simulation Monte Carlo method for the flow of hydrogen and methane mixture in a cylindrical channel is developed. Heterogeneous reactions on tungsten channel surfaces are included into the model. Their effects on flows are analyzed. A onedimensional approach based on the solution of equilibrium chemical kinetics equations is used to analyze gas-phase methane decomposition. The obtained results may be useful for optimization of gas-dynamic sources of activated gas diamond synthesis.The method of Hot-Wire Chemical Vapor Deposition (HWCVD) is widely used for diamond deposition from an activated precursor gas. Its main feature is activation of a gas precursor on metallic surfaces: wires, placed in a virtually resting gas [1] or in high-speed flows [2], as well as cylindrical channels [3]. The presented work is devoted to the numerical study of gas-dynamic aspects of the rarefied gas flow in a hot tube with dissociation and recombination on the surface. The algorithm of direct simulation Monte Carlo (DSMC) method [4] with majorant frequency scheme [5] is used for the numerical analysis and optimization of approaches to deposition of diamond-like films using the hot tubes. In [6][7][8] the importance of taking into account dissociation and recombination in the analysis of flows in the tubes was shown. The use of a cylindrical channel as an activator provides better gas dissociation due to multiple collisions with the surface [6][7][8] in comparison with the case of interaction of the supersonic flow with a wire obstacle [9,10]. A one-dimensional approach based on the solution of equilibrium chemical kinetics equations was used to analyze gas-phase methane decomposition.The main goal of the presented work is to analyze the influence of the determining parameters on the composition and energy state of the gases flowing to the substrate. Particular attention is paid to the behavior of atomic hydrogen, one of the main components that determine the synthesis of diamond structures.

show abstract

Deposition of diamond structures from interacting gas jets

Cited by 19 publications

References 6 publications

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Synthesis of diamond structures from the coaxial flows of Н₂and Н₂+СН₄mixture

Modeling the flow of activated H₂+ CH₄mixture by deposition of diamond nanostructures

Contact Info

Product

Resources

About

Deposition of diamond structures from interacting gas jets

Cited by 19 publications

References 6 publications

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Development of the Effective Reaction Model for Diamond Deposition Simulation within the Continuous Media Approach

Synthesis of diamond structures from the coaxial flows of Н2and Н2+СН4mixture

Modeling the flow of activated H2+ CH4mixture by deposition of diamond nanostructures

Contact Info

Product

Resources

About

Synthesis of diamond structures from the coaxial flows of Н₂and Н₂+СН₄mixture

Modeling the flow of activated H₂+ CH₄mixture by deposition of diamond nanostructures