Deposition of fluorocarbon film with 1,1,1,2-tetrafluoroethane pulsed plasma polymerization

Wang, Yan-Ren; Ma, Wei‐Chun; Lin, Jin-He; Lin, Hsin-Hua; Tsai, Chieh-Yuan; Huang, Chun

doi:10.1016/j.tsf.2014.03.026

Cited by 8 publications

(6 citation statements)

References 25 publications

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“…Low‐pressure plasma deposition of fluorocarbon films has been widely studied in the last decades . The main goal of those works was to evaluate the capability of tuning the chemistry of the coatings by controlling parameters such as the plasma source or the feed gases (monomers and additives).…”

Section: Introductionmentioning

confidence: 99%

“…Low-pressure plasma deposition of fluorocarbon films has been widely studied in the last decades. [1][2][3][4][5][6] The main goal of those works was to evaluate the capability of tuning the chemistry of the coatings by controlling parameters such as the plasma source or the feed gases (monomers and additives). For instance, gaseous precursors such as C2F6, C3F8, and C4F8 were studied in continuous wave, pulsed, and downstream radio-frequency plasmas.…”

Section: Introductionmentioning

confidence: 99%

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Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

Hubert

Vandencasteele

Mertens

et al. 2015

Plasma Processes & Polymers

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International audienceThe atmospheric pressure PECVD deposition and texturization of hydrophobic coatings using liquid fluorinated C6F12 and C6F14 precursors are investigated. The effect of the carrier gas (argon and helium) is discussed in terms of the behavior of the gas phase and of the characteristics of the deposited film. Mass spectrom-etry measurements indicate that the fragmentation is higher with argon while helium reacts very easily with oxygen impurities leading to the formation of CxFyOz compounds. These observations are consistent with the chemical composition of the films determined by XPS and the variation in the deposition rate. Moreover, the streamers present in the argon discharge affect the morphology of the surface by increasing the roughness, which leads to the increase in the hydrophobicity of the coatings

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

Hubert

Vandencasteele

Mertens

et al. 2015

Plasma Processes & Polymers

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“…In PECVD deposition, various radicals can be formed as the gas bonds are broken. There is a relationship between rf-power increase and bond breaking, giving rise to different radicals 48 . As the bond-breaking intensifies, the formation of cross-links in the film structure increases, so a broadening of the peak at 1200 cm -1 occurs, due to vibrational modes of the bonds of the various radicals CF, CF 2 , and CF 3 .…”

Section: Resultsmentioning

confidence: 99%

Superhydrophobic and Low Reflectance Carbon Nanotubes Buckypapers

Campos

Rocha

et al. 2022

Mat. Res.

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In this paper, carbon nanotube (CNT) buckypapers (BPs) were produced by vacuum filtration of CNT water suspensions prepared by sonication using 0.5 wt % of Triton X-100 dispersing agent. The as-produced BPs were efficiently dispersed and presented very low optical reflectance, with an average reflectance of 1.30% in the visible range and hydrophilic/oleophilic properties, readily absorbing water or oil liquid drops through their network of pores. Plasma treatment with 1, 1, 1, 2 tetrafluoroethane (C 2 H 2 F 4 ) turned the BPs superhydrophobic with water contact angles (CA) greater than 140°, while still maintaining their oleophilic properties unchanged. This effect is attributed to the combination of the decrease of surface energy and modification of the surface structure with micro/ nanopores due to the coating with a fluorocarbon film. After only 1 minute plasma treatment, the BPs presented high hydrophobicity (CA = 145°) while keeping their oleophilicity and the very low optical reflectance essentially unaffected. These results indicate that a good combination of low reflectance and a superhydrophobic/oleophilic behavior can be achieved which is of importance for technological applications that require super black surfaces and prevent water from being absorbed, improving the handling of optical signals and increasing the useful life of materials.

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“…For the reaction, a 5/95 ms pulse sequence was used, which means that the plasma was on for 5 ms and then off for 95 ms for the whole pulsed experiment. To achieve this pulse sequence, the duty cycle (defined as the ratio of pulse on time to the total cycle time 16 ) was chosen as 5%. Table 1 shows the process parameters of the plasma deposition system.…”

Section: Fabrication Of Super-hydrophobic Cotton Fabricsmentioning

confidence: 99%

Fabrication of super-hydrophobic cotton fabric by low-pressure plasma-enhanced chemical vapor deposition

Deng

Guo

et al. 2018

Textile Research Journal

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In this paper, a super-hydrophobic cotton fabric was fabricated by low-pressure plasma-enhanced chemical vapor enhanced deposition (LP-PECVD) with lauryl methacrylate (LMA) as the functional monomer. Scanning electron microscopy (SEM), atomic force microscope (AFM) and X-ray photoelectron spectroscopy were used to analyze the changes of surface morphology and chemical composition of the cotton fabrics surface, respectively. A randomly wrinkled morphology was exhibited by SEM and AFM. The combination of the low surface energy film of LMA and micro-nano-scale structure resulted in the super-hydrophobicity of modified cotton fabrics. The reactive species in LMA/Ar plasma were studied by optical emission spectroscopy, and based on the results of the test, the reaction principle in the plasma reaction chamber was discussed. It was proved that the LMA film is polymerized by chemical bonds on the surface of cotton fibers. The water repellency, washing stability, water-vapor transmission, air permeability and tensile property of fabrics were also discussed. We found that a washing-stable and breathable super-hydrophobic cotton fabric can be achieved after treatment without decreasing the tensile property.

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Deposition of fluorocarbon film with 1,1,1,2-tetrafluoroethane pulsed plasma polymerization

Cited by 8 publications

References 25 publications

Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

Chemical and Physical Effects of the Carrier Gas on the Atmospheric Pressure PECVD of Fluorinated Precursors

Superhydrophobic and Low Reflectance Carbon Nanotubes Buckypapers

Fabrication of super-hydrophobic cotton fabric by low-pressure plasma-enhanced chemical vapor deposition

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