DEPOSITION OF TiOxNy THIN FILMS WITH VARIOUS NITROGEN FLOW RATE: GROWTH BEHAVIOR AND STRUCTURAL PROPERTIES

Cho, S. J.; Jung, Chanwon; Bae, I.-S.; Song, Yu; Boo, Jin Hyo

doi:10.1142/9789814322799_0007

Advanced Materials and Processing 2010 2011

DOI: 10.1142/9789814322799_0007

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DEPOSITION OF TiO_xN_y THIN FILMS WITH VARIOUS NITROGEN FLOW RATE: GROWTH BEHAVIOR AND STRUCTURAL PROPERTIES

S. J. Cho¹,

Chanwon Jung²,

I.-S. Bae³

et al.

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DEPOSITION OF TiO_xN_y THIN FILMS WITH VARIOUS NITROGEN FLOW RATE: GROWTH BEHAVIOR AND STRUCTURAL PROPERTIES

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