1983
DOI: 10.1149/1.2119780
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Deposition of GaAs Epitaxial Layers by Organometallic CVD: Temperature and Orientation Dependence

Abstract: Epitaxial layers of GaAs have been grown in an atmospheric organometallic CVD system, for a wide variety of gas phase reactant partial pressures and over a broad range of temperature (450~176The growth rates for (100), (100) + 3 ~ --* < 110>, (110), (111)Ga, and (111)As substrates are reported as functions of temperature and gas composition. Three distinct temperature dependent regions of growth are identified, corresponding to a mid-temperature mass transport limited range, a lowtemperature kinetic controlled… Show more

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Cited by 299 publications
(66 citation statements)
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“…4a-c. This is consistent with previous reports [13] and because the activation energy for two dimensional planar growth is known to decrease with increasing V/III ratio [14]. Consequently, the two dimensional, that is, radial, growth rate increases with V/III ratio, resulting in more tapered nanowires.…”
Section: Methodssupporting
confidence: 93%
“…4a-c. This is consistent with previous reports [13] and because the activation energy for two dimensional planar growth is known to decrease with increasing V/III ratio [14]. Consequently, the two dimensional, that is, radial, growth rate increases with V/III ratio, resulting in more tapered nanowires.…”
Section: Methodssupporting
confidence: 93%
“…The activation energy, 58.86 kJ/mol found agreed with activation energy for the overall GaAs low-temperature MOCVD process (D. H. Reep, S. K. Ghandi, 1983). Borgstrom et al (2004) found in their observation of activation energy at higher growth temperature after limitation of nanowires growth rate, that Au on top of the nanowires does not effect the activation energy, but the process outside the droplet (M. Borgstrom, K. Depert, L. Samuelson, W. Seifert, 2004).…”
Section: Resultssupporting
confidence: 79%
“…The equation used was where E a is the activation energy and R is the gas constant equal to 8.314472 JK -1 mol -1 (James F. Shackelford, 1996). The activation energy, 58.86 kJ/mol found agreed with activation energy for the overall GaAs low-temperature MOCVD process (D. H. Reep, S. K. Ghandi, 1983). Borgstrom et al (2004) found in their observation of activation energy at higher growth temperature after limitation of nanowires growth rate, that Au on top of the nanowires does not effect the activation energy, but the process outside the droplet (M. Borgstrom, K. Depert, L. Samuelson, W. Seifert, 2004).…”
Section: Resultssupporting
confidence: 77%