Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers

Yang, Bing; Li, Haining; Yu, Biao; Huang, Nan; Liu, Lusheng; Jiang, Xin

doi:10.1016/j.diamond.2020.107928

Cited by 15 publications

(5 citation statements)

References 37 publications

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“…However, it is known from studies by other groups, that such a density of SiC grains can be controlled by varying CVD synthesis conditions and Si abundance in the gas. 16,75–77…”

Section: Resultsmentioning

confidence: 99%

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Microporous poly- and monocrystalline diamond films produced from chemical vapor deposited diamond–germanium composites

et al. 2023

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“…However, it is known from studies by other groups, that such a density of SiC grains can be controlled by varying CVD synthesis conditions and Si abundance in the gas. 16,75–77…”

Section: Resultsmentioning

confidence: 99%

“…However, it is known from studies by other groups, that such a density of SiC grains can be controlled by varying CVD synthesis conditions and Si abundance in the gas. 16,[75][76][77] In the diamond-Ge composite (Fig. 4c), well-faceted large grains of crystalline Ge can be observed.…”

Section: Comparison Of Diamond-sic and Diamond-ge Compositesmentioning

confidence: 93%

Microporous poly- and monocrystalline diamond films produced from chemical vapor deposited diamond–germanium composites

et al. 2023

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“…Typically, tensile residual stresses are associated with coating fragmentation, while compressive residual stresses facilitate buckling and delamination [53]. A substantial amount of internal stress could therefore lead to delamination at lower (or higher) critical loads [54], since the work required to delaminate the coating is a combination of the applied stress and internal stress in the coating [21]. To clarify that point, a more detailed investigation of NCD films stresses would be required.…”

Section: Discussionmentioning

confidence: 99%

Combinatorial Materials Design Approach to Investigate Adhesion Layer Chemistry for Optimal Interfacial Adhesion Strength

et al. 2021

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A combinatorial material adhesion study was used to optimize the composition of an adhesion promoting layer for a nanocrystalline diamond (NCD) coating on silicon. Three different adhesion promoting metals, namely W, Cr, and Ta, were selected to fabricate arrays of co-sputtered binary alloy films, with patches of seven different, distinct alloy compositions for each combination, and single element reference films on a single Si wafer (three wafers in total; W–Cr, Cr–Ta, Ta–W). Scratch testing was used to determine the critical failure load and practical work of adhesion for the NCD coatings as a function of adhesion layer chemistry. All tested samples eventually exhibit delamination of the NCD coating, with buckles radiating perpendicularly away from the scratch track. Application of any of the presented adhesion layers yields an increase of the critical failure load for delamination as compared to NCD on Si. While the influence of adhesion layers on the maximum buckle length is less pronounced, shorter buckles are obtained with pure W and Cr–Ta alloy layers. As a general rule, the addition of an adhesion layer showed a 75% improvement in the measured adhesion energies of the NCD films compared to the NCD coating without an adhesion layer, with specific alloys and compositions showing up to 125% increase in calculated practical work of adhesion.

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“…Both of them are chemically inert and biocompatible with many biological applications [9][10][11][12][13]. Researchers (including from Hasselt University) have deposited diamond coatings on Ti substrates [14][15][16][17][18], sometimes using intermediate layers [19,20] such as SiC [21][22][23] via a CVD deposition route. Hydrogen diffusion into the Ti structure leading to microstructure coarsening has been reported to be a CVD synthesis issue [24].…”

Section: Introductionmentioning

confidence: 99%

Deposition and Characterisation of a Diamond/Ti/Diamond Multilayer Structure

Mallik,

Lloret,

Gutierrez

et al. 2023

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In this work, a diamond/Ti/diamond multilayer structure has been fabricated by successively following thin-film CVD and PVD routes. It has been found that a combined pre-treatment of the silicon base substrate, via argon plasma etching for creating surface roughness and, thereafter, detonation nanodiamond (DND) seeding, helps in the nucleation and growth of well-adherent CVD diamond films with a well-defined Raman signal at 1332 cm−1, showing the crystalline nature of the film. Ti sputtering on such a CVD-grown diamond surface leads to an imprinted bead-like microstructure of the titanium film, generated from the underlying diamond layer. The cross-sectional thickness of the titanium layer can be found to vary by as much as 0.5 µm across the length of the surface, which was caused by a subsequent hydrogen plasma etching process step of the composite film conducted after Ti sputtering. The hydrogen plasma etching of the Ti–diamond composite film was found to be essential for smoothening the uneven as-grown texture of the films, which was developed due to the unequal growth of the microcrystalline diamond columns. Such hydrogen plasma surface treatment helped further the nucleation and growth of a nanocrystalline diamond film as the top layer, which was deposited following a similar CVD route to that used in depositing the bottom diamond layer, albeit with different process parameters. For the latter, a hydrogen gas diluted with PH3 precursor recipe produced smaller nanocrystalline diamond crystals for the top layer. The titanium layer in between the two diamond layers possesses a very-fine-grained microstructure. Transmission electron microscopy (TEM) results show evidence of intermixing between the titanium and diamond layers at their respective interfaces. The thin films in the composite multilayer follow the contour of the plasma-etched silicon substrate and are thus useful in producing continuous protective coatings on 3D objects—a requirement for many engineering applications.

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Deposition of highly adhesive nanocrystalline diamond films on Ti substrates via diamond/SiC composite interlayers

Cited by 15 publications

References 37 publications

Microporous poly- and monocrystalline diamond films produced from chemical vapor deposited diamond–germanium composites

Microporous poly- and monocrystalline diamond films produced from chemical vapor deposited diamond–germanium composites

Combinatorial Materials Design Approach to Investigate Adhesion Layer Chemistry for Optimal Interfacial Adhesion Strength

Deposition and Characterisation of a Diamond/Ti/Diamond Multilayer Structure

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