“…The common operational mode of atmospheric pressure DBD is filamentary (Ref 54,(57)(58)(59)(60)(61)(62)(63)(64)(65)(66)(67)71), resulting in strong spatial nonuniformity of plasma chemistry that can alter the quality of the films. On the contrary, glow DBD modes (Ref 53,55,56,(68)(69)(70)72), sometimes, referred to as low current atmospheric pressure Townsend-like discharge or high current atmospheric pressure glow-like discharge, are expected to give high quality films. This uniform mode of DBD is observed for a very restricted set of parameters such as gas mixture, dissipated power, operational frequency, etc.…”