“…As it was the first time, according to our knowledge that crystallization of oxide films was studied versus oxygen pressure, we have verified that the general trend observed for CeO 2 was also observed in La 2 Zr 2 O 7 films where residual carbon due to metal-organic precursor decomposition has important consequences [23,25,30]. After deposition, the films were heat treated at 950 1C in Ar-5% H 2 forming gas and submitted the same procedure as for CeO 2 .…”