2012
DOI: 10.1016/j.intermet.2011.10.007
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Deposition of multicomponent metallic glass films by single-target magnetron sputtering

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Cited by 60 publications
(38 citation statements)
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References 35 publications
(37 reference statements)
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“…The ultra-quenched Zr 55 Cu 30 Ni 5 Al 10 metallic glass was fabricated by means of rf-magnetron sputtering deposition 31 . To acquire sufficient DSC and XRD signals, B30-mm thick glassy films were prepared with the wellcontrolled sample temperature below 50°C.…”
Section: Methodsmentioning
confidence: 99%
“…The ultra-quenched Zr 55 Cu 30 Ni 5 Al 10 metallic glass was fabricated by means of rf-magnetron sputtering deposition 31 . To acquire sufficient DSC and XRD signals, B30-mm thick glassy films were prepared with the wellcontrolled sample temperature below 50°C.…”
Section: Methodsmentioning
confidence: 99%
“…The different columnar-like growth morphology for the Zr-43 at.% Co TFMG is considered to be mainly influenced by the deposition parameters. In a recent paper, Liu et al [51] reported for the Zr-Cu-Al-Ni multicomponent TFMG distinct vertical columnar structures of the films. Based on their results, the deposition conditions such as pressure and sputtering powers become two key factors which govern the film growth.…”
Section: Microstructural Characterization Of As-deposited Filmsmentioning
confidence: 98%
“…lower regions [17,44] . Similar surface morphologies have also observed in other TFMGs systems [17,44,45] .…”
Section: Microstructure Characterizationmentioning
confidence: 99%
“…In the past decade, a variety of TFMGs, including Pd- [13][14][15] , Zr- [16][17][18][19][20][21][22][23] , Mg- [24,25] , Al- [26,27] and Ag-based [28][29][30] systems, have been successfully fabricated by magnetron sputtering technique.…”
Section: Introductionmentioning
confidence: 99%