Deposition of nanocomposite TiN-Si3N4 thin films by hybrid cathodic arc and chemical vapor process

Bendavid, Avi; Martin, Phil; Cairney, Julie M.; Hoffman, Mark; Fischer-Cripps, A. C.

doi:10.1007/s00339-004-2951-0

Cited by 29 publications

(14 citation statements)

References 34 publications

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“…Above this Si content N starts to decrease at continuously decreasing average D at . This behavior is in agreement with the published experimental results [6,18,19]. We found that it is accompanied by increasing T am from 1 to several monolayers, leading to a lower H at high [Si].…”

Section: Dependence Of the Structural Characteristics Of Nc-tisin On supporting

confidence: 93%

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Atomistic simulations of the characteristics of TiSiN nanocomposites of various compositions

Houška

Klemberg-Sapieha

Martinů

2009

Surface and Coatings Technology

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Section: Dependence Of the Structural Characteristics Of Nc-tisin On supporting

confidence: 93%

“…On the contrary, number of authors report for the TiSiN [6,18,19] or other MSiN [3,8,9] systems that D monotonously decreases (either in all directions or at least in the surface plane) with [Si] also above the value corresponding to the highest hardness.…”

Section: Introductionmentioning

confidence: 95%

Atomistic simulations of the characteristics of TiSiN nanocomposites of various compositions

Houška

Klemberg-Sapieha

Martinů

2009

Surface and Coatings Technology

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“…The silicon in Me-Si-N coatings (without oxygen) always appears to be amorphous Si 3 N 4 phase in the grain boundaries. The existence of a certain amount of silicon could increase the amorphous phase and reduce grain coarsening in TiSiCN coating [23,24] .…”

Section: Discussionmentioning

confidence: 99%

Microstructure and Mechanical Properties of Ti(Cr)SiC(O)N Coatings Deposited by Plasma Enhanced Magnetron Sputtering

Xin

Zhang

Wang

et al. 2017

Rare Metal Materials and Engineering

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TiSiCN, TiSiCON, TiCrSiCN, TiCrSiCON, CrSiCN and CrSiCON coatings have been deposited on WC-Co substrates and Si wafers using plasma enhanced magnetron sputtering (PEMS) technique. The microstructure, composition and mechanical properties of the non-oxygen coatings and oxygen-containing coatings were studied by XRD, SEM, EDS and load-depth-sensing indentation. The tribological behavior of the coatings against Al2O3 balls was conducted by pin-on-disc tests. The results show that TiSiCON, TiCrSiCON and CrSiCON coatings exhibit the face center cubic (fcc) TiN-type (or CrN-type) structure. The existence of oxygen will induce loose structure and more defects for TiSiCON, TiCrSiCON and CrSiCON coatings compared with TiSiCN, TiCrSiCN and CrSiCN, respectively. The addition of oxygen element would lead to the decrease of the hardness (H) and elasticity of Ti(Cr)SiCN coatings. TiCrSiCON and CrSiCON coatings with oxygen element have lower friction coefficients and wear rate compared with TiCrSiCN and CrSiCN coatings without oxygen, respectively. The TiSiCON with higher friction coefficient and wear rate shows poor abrasive wear resistance than TiSiCN.

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“…R esearch over the last decade has demonstrated that TiSiN films have, compared with TiN, superior mechanical properties including super‐high hardness (>40 GPa) 1–4 and good wear resistance, 5 as well as good oxidation resistance at evaluated temperatures 6 . Because of the attractive properties, TiSiN coatings may be applied to increase the wear‐resistance of ductile components in engineering applications ranging from machining tools 1 to biomedical devices 7 .…”

Section: Introductionmentioning

confidence: 99%

Three-dimensional Visualization of Scratch-Induced Subsurface Damage in TiSiN/TiN Multilayer Coating Using Focused Ion Beam-Scanning Electron Microscopic Tomography Technique

Munroe

Xie

et al. 2011

Journal of the American Ceramic Society

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It is a common practice to study crack patterns in brittle solids for strength analysis. Observations based on cracks visible on surfaces or randomly chosen cross‐sectional planes may be ambiguous and lead to an inaccurate interpretation of deformation behavior. In this study, three‐dimensional reconstruction obtained using a focused ion beam–scanning electron microscopic tomography technique was applied, for the first time, to observe the site‐specific deformation created by a scratching load on a TiSiN/TiN multilayer hard coating. This technique was demonstrated to be a powerful tool in providing detailed morphology of cracks that formed in coatings with complex structures, which would be difficult to obtain by conventional experimental methods. The cracks observed in the TiSiN/TiN multilayer coating are similar in morphology to cone cracks, which are commonly observed in homogeneous brittle solids; however, they are slightly different in this work due to the presence of sublayers in the coating with differing moduli. By locating the first crack visible on the scratched surface, in conjunction with scratch data obtained from the nanoindenter, the critical tensile stress for the formation of the cracks observed in this TiSiN/TiN multilayer coating was estimated to be ∼2.6 GPa.

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Deposition of nanocomposite TiN-Si3N4 thin films by hybrid cathodic arc and chemical vapor process

Cited by 29 publications

References 34 publications

Atomistic simulations of the characteristics of TiSiN nanocomposites of various compositions

Atomistic simulations of the characteristics of TiSiN nanocomposites of various compositions

Microstructure and Mechanical Properties of Ti(Cr)SiC(O)N Coatings Deposited by Plasma Enhanced Magnetron Sputtering

Three-dimensional Visualization of Scratch-Induced Subsurface Damage in TiSiN/TiN Multilayer Coating Using Focused Ion Beam-Scanning Electron Microscopic Tomography Technique

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