Deposition of osmium and ruthenium thin films from organometallic cluster precursors

Abstract

Single-source organometallic precursors based on a number of homometallic clusters as well as heterometallic cluster RuOs 3 (CO) 13 (µ-H) 2 have been used for the chemical vapor deposition of osmium films and osmium-ruthenium alloy films, respectively.

2D noble metals: growth peculiarities and prospects for hydrogen evolution reaction catalysis

“…This eventually might lead to good wetting characteristics of the Os film. A systematic review of existing literature, including reports on growth of thin osmium films by using differential potential pulse deposition method 51 , atomic layer deposition 52 , chemical vapor deposition 53,54,55 , and magnetron sputtering 56 , has highlighted a potential pathway for the synthesis of true 2D Os layers. Particularly, a more beneficial combination of the molecular precursors for ALD/CVD growth and supporting substrates could facilitate a template-assisted 2D growth regime of osmium.…”

Ruthenium complexes as precursors for chemical vapor-deposition (CVD)

“…Li et al 157 also explored a single source precursor heteronuclear carbonyl cluster [RuOs 3 (CO) 13 (m-H )2 ] 62 for the preparation of thin lms of Os-Ru binary alloy. The ratio of osmium to ruthenium varied with the deposition temperature, and at higher temperatures (400-500 C) the deposited surface was smoother.…”

Oxidative addition of 1,4‐dichloro‐2‐butyne to an organoplatinum complex: A new precursor for synthesis of ultrasmall Pt nanoparticles thin film at liquid/liquid interface as the electrocatalyst in methanol oxidation reaction

“…Decomposition of organometallic complexes in milder conditions provides a route for preparation of nanoparticles (NPs) with controllable size without using organic salts, oxides and halides . Wide range of metal and metal oxide NPs such as Ru, Au, Rh, Pt, Fe, Ni, Pd, Cu, Co, ZnO, bimetallic NPs such as PtMn, PtCo, FePd, PdCu, PtRu, PtAu and thin films such as (Fe 1‐x Co x ) 3 P, Fe 3 (P 1‐x Te x ), ZnS, In 2 S 3, Os and Ru were prepared by using of organometallic complexes. Decomposition, pyrolysis and chemical vapor deposition of organometallic precursors have been known as general pathways for production of NPs with clean procedures in mild conditions.…”