Deposition of polymeric sensing materials for gas detection

Abstract

Once a promising polymeric (detection) material is identified, it needs to be incorporated into a MEMS sensor. In this sensor functionalization step, the deposition of the polymeric material on the sense‐plate should be accurate and repeatable. After a quick overview of different deposition methods and related solubility characteristics of polyaniline (and derivatives), drop coating is implemented to deposit polyaniline on sense‐plates, moving from a manual deposition technique to a semi‐automated deposition procedure with more practical benefits, and identifying an optimal ‘carrier’ mixture of 10–15/90–85 polyaniline/ethylene glycol. A correlation can be established between area coverage and polymer mass, which leaves room for future fully automated deposition using image processing.

Archie E. Hamielec memorial issue

“…The authors of the articles in this issue join us from many countries and institutions across the globe (Figure 1 and Table 1) to thank Archie for his enduring legacy in polymerization reaction engineering, a field of academic and industrial interest that he established practically single‐handedly. [ 1–45 ]…”

Unraveling the Nature of Sensing in Electrostatic MEMS Gas Sensors

“…Considering that, we employed a semi-automated deposition system, which consisted of a nanostage equipped with a 20µm tip glass micropipette [30], integrated into a…”