2007
DOI: 10.1002/sia.2563
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Deposition of polysiloxane‐like nanofilms onto an aluminium alloy by plasma polymerized hexamethyldisiloxane: characterization by XPS and contact angle measurements

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Cited by 31 publications
(19 citation statements)
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“…The preparation of SiO x C y H z layer was thus confirmed. The contact angle increased to ~ 87¡ after the PECVD deposition, highlighting a hydrophobic surface, in agreement with previous studies (Azioune et al, 2007;Yeo et al, 2006).…”
Section: ! Results and Discussionsupporting
confidence: 92%
“…The preparation of SiO x C y H z layer was thus confirmed. The contact angle increased to ~ 87¡ after the PECVD deposition, highlighting a hydrophobic surface, in agreement with previous studies (Azioune et al, 2007;Yeo et al, 2006).…”
Section: ! Results and Discussionsupporting
confidence: 92%
“…In the case of g-FOTES, the C 1 s signal was a convolution of five components at 285.2 eV, originating from C-C and C-Si [44][45][46], and at 286.5, 291.5, 294.0, and 288.0 eV attributable to C-O [39], -CF 2 and -CF 3 groups [39,44,45], as well as a contamination component, respectively (Figure 4c). Two components for the Si 2p signal at 102.9 and 103.7 eV were ascribed to Si-C [47,48] and glass [49], as shown in Figure 4f.…”
Section: Resultsmentioning
confidence: 99%
“…Films deposited from the activation of precursors by glow discharges (PECVD) appears as in interesting alternative 4 since their physical and chemical properties can be tailored by the plasma excitation parameters 6 . The deposition process is free of toxic solvents and chromates 5,6 , dry, clean, fast, relatively inexpensive and easy to perform. Furthermore, it provides uniform, homogeneous and pinhole-free coatings, very convenient characteristics as one considers barrier properties.…”
Section: Introductionmentioning
confidence: 99%
“…Organosilicon to oxide films can be deposited by PECVD from hexamethyldisiloxane, HMDSO 5,[7][8][9] . The deposition kinetics is based on the HMDSO fragmentation and multiple step reactions in the plasma phase, providing precursors for film formation 7 .…”
Section: Introductionmentioning
confidence: 99%
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