Deposition of silicon-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition using an intermittent supply of organosilane

Nakazawa, Hiroyuki; Kamata, Ryosuke; Okuno, Saori

doi:10.1016/j.diamond.2014.10.010

Cited by 13 publications

(8 citation statements)

References 23 publications

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“…According to [1], such behavior of G peak position and D/G peak intensity ratio indicates a significantly increased sp 3 /sp 2 carbon bond ratio. It should be mentioned that such behavior was reported in numerous studies for both hydrogen-free and hydrogenated DLC films containing silicon or SiO x [8,[33][34][35][36]. G peak position downshift to 1505 cm −1 [21], 1495 cm −1 [23], 1480 cm −1 [12] and even as low as 1460 cm −1 [17,19] was reported.…”

Section: Structurementioning

confidence: 53%

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

et al. 2020

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In the present research diamond-like carbon (DLC) films containing 4–29 at.% of silicon were deposited by reactive magnetron sputtering of carbon target. Study by X-ray photoelectron spectroscopy revealed the presence of Si–C bonds in the films. Nevertheless, a significant amount of Si–O–C and Si–Ox bonds was present too. The shape of the Raman scattering spectra of all studied diamond-like carbon containing silicon (DLC:Si) films was typical for diamond-like carbon. However, some peculiarities related to silicon doping were found. Studies on the dependence of DLC:Si of the optical transmittance spectra on the Si atomic concentration have shown that doping by silicon affects linear, as well as nonlinear, optical properties of the films. It is shown that the normalized reflectance of DLC:Si films decreased with the increased exciting light fluence. No clear relation between the normalized reflectance and photoexcited charge carrier relaxation time was found. It was suggested that that the normalized reflectance decrease with fluence can be related to nonlinear optical properties of the hydrogenated diamond-like carbon phase in DLC:Si film.

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Section: Structurementioning

confidence: 53%

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

et al. 2020

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“…Migration paths of a-C:H samples doped with B, N, I, Si, Ag, and Ti elements [21,30,[46][47][48][49][50][51] are shown in Fig. 14(a), and that of a-C:H samples irradiated with He + , N + , and Ag + ions [52][53][54] in Fig.…”

Section: Modification Of A-c:h Samplesmentioning

confidence: 99%

A ternary phase diagram for amorphous carbon

Zhang

Wei

Lin

et al. 2015

Carbon

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“…It was modied by 4-ABA and PtNPs alternately and possessed the surface properties of both. 38 XPS is an effective and non-destructive technique for investigating the chemical composition and structure of carbon materials. In this work, a wide scan range from 0 eV to 1200 eV was employed.…”

Section: Electrode Modication and Characterizationmentioning

confidence: 99%

Interfacial structure and electrochemical sensing properties of nitrogen-doped diamond-like carbon film electrodes modified with platinum nanoparticles and 4-aminobenzoic acid

et al. 2015

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Deposition of silicon-doped diamond-like carbon films by plasma-enhanced chemical vapor deposition using an intermittent supply of organosilane

Cited by 13 publications

References 23 publications

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties

A ternary phase diagram for amorphous carbon

Interfacial structure and electrochemical sensing properties of nitrogen-doped diamond-like carbon film electrodes modified with platinum nanoparticles and 4-aminobenzoic acid

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