Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

Abdelhameed, A. H.; Jacob, W.

doi:10.1016/j.surfcoat.2019.07.046

Cited by 11 publications

(2 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, WN also belongs to the class of refractory metal nitrides with excellent mechanical, tribological, adhesive properties, and good chemical stability. [286,287] Furthermore, WN exhibits low friction coefficient and self-lubricating properties because of tungsten oxides (WO) forming on the surface. In this regard, WN film can be considered as one of the best protective coatings.…”

Section: Experimental Conditionmentioning

confidence: 99%

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Bharani

Sharma

2022

Physica Status Solidi (a)

View full text Add to dashboard Cite

Transition metal nitride (TMN) thin films exhibit outstanding physical, chemical, and mechanical properties, making them best suitable for a wide variety of applications. The most commonly used technique to produce metal nitride thin films with specific properties at optimum conditions is magnetron sputtering. Considering this, this review begins with advancements in the sputtering process from basic diode sputtering to the most commonly used pulsed magnetron sputtering. Further, the literature on several TMNs deposited via magnetron sputtering is summarized, referring to several articles that have been published during the last decades. The main emphasis lies on nitride-based thin films' structural, morphological, and mechanical aspects for various applications. In addition, the influence of reactive gas flow rate, substrate temperature, layer thickness, postannealing temperature, substrate bias voltage, protective layers, the sputtering technique adopted, etc. on the quality and performance of the thin films is also focused. The overall review work can be beneficial for the students and researchers in understanding the basic sputtering phenomenon with its advancements, the relationship between deposition parameters and surface properties, and to know the current research trend for exploring several research gaps in the literature.

show abstract

Section: Experimental Conditionmentioning

confidence: 99%

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Bharani

Sharma

2022

Physica Status Solidi (a)

View full text Add to dashboard Cite

show abstract

“…Tungsten Nitride has good hardness, chemical stability, thermal stability, high electrical and thermal conductivity, and wear-resistant protective coating on mechanical components, so it is widely used for thin coatings on substrates [8]. This research aims to perform treatment with the DC sputtering technique with variations of Argon gas and Nitrogen gas to obtain high hardness on the cylinder wall.…”

Section: Introductionmentioning

confidence: 99%

Structural and Mechanical Characterization of Tungsten Nitride Coatings Prepared by Dc Sputtering at Cylinder Liner

Ahmadi,

Aziz,

Sari

et al. 2023

mesin

View full text Add to dashboard Cite

The cylinder liner is a tube that protects the piston and is a place for the combustion process. The combustion process causes continuous friction to make the cylinder liner wear out. Therefore the cylinder liner must be made of materials that have high hardness. To obtain a high hardness level, surface treatment with DC sputtering techniques is carried out. Surface treatment with DC sputtering technique for 120 minutes with variations of Argon gas and Nitrogen gas 70:30, 80:20, and 90:10. Based on the XRD test results, all treated samples contained a WN layer. The crystal structure of the raw material samples is hexagonal, and the crystal structure of all processed samples is cubic. Vickers hardness characterization shows that the raw material is 110.93 HV. While the sample treated with Ar70:N30 was 234.66 HV. The optimum hardness occurred in samples treated with Ar80:N20 with a hardness of 311.87 HV. However, the Ar90:N10 treatment experienced a decrease in hardness to 130.44 HV. Based on the results of thin film testing, WN affects the increase in the hardness of the cylinder liner material. This is evidenced by the increase in hardness in samples coated with WN.

show abstract

Role of nitrogen partial pressure, deposition rate and annealing on stability of β-W phase

Singh

Gupta

et al. 2023

Appl. Phys. A

View full text Add to dashboard Cite

Deposition of thermally stable tungsten nitride thin films by reactive magnetron sputtering

Cited by 11 publications

References 14 publications

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Magnetron Sputtered Thin Films Based on Transition Metal Nitride: Structure and Properties

Structural and Mechanical Characterization of Tungsten Nitride Coatings Prepared by Dc Sputtering at Cylinder Liner

Role of nitrogen partial pressure, deposition rate and annealing on stability of β-W phase

Contact Info

Product

Resources

About