Deposition of Ti1−xAlxN using bipolar pulsed dual magnetron sputtering

Åstrand, Maria; Selinder, T. I.; Sjöstrand, M.E.

doi:10.1016/j.surfcoat.2005.01.016

Cited by 16 publications

(9 citation statements)

References 19 publications

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“…103 It is also frequently applied for the growth of complex materials of varying stoichiometry by varying the power to the targets independently as well as the target to substrate distance. 104 A dual magnetron sputtering system for deposition inside tubular substrates has been developed using a combination of dcMS and HiPIMS discharges arranged in the open field configuration 105 and a dual HiPIMS discharge in the closed field configuration has been demonstrated. 106 In the closed configuration (using unbalanced magnetrons of type II, with stronger outer poles) a virtual anode between the magnetrons can be avoided, and the expansion of the plasma to fill the space between the magnetrons is promoted.…”

Section: Discharge Configurationmentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

636

446

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The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron target in unipolar pulses at low duty cycle and low repetition frequency while keeping the average power about 2 orders of magnitude lower than the peak power. This results in a high plasma density, and high ionization fraction of the sputtered vapor, which allows better control of the film growth by controlling the energy and direction of the deposition species. This is a significant advantage over conventional dc magnetron sputtering where the sputtered vapor consists mainly of neutral species. The HiPIMS discharge is now an established ionized physical vapor deposition technique, which is easily scalable and has been successfully introduced into various industrial applications. The authors give an overview of the development of the HiPIMS discharge, and the underlying mechanisms that dictate the discharge properties. First, an introduction to the magnetron sputtering discharge and its various configurations and modifications is given. Then the development and properties of the high power pulsed power supply are discussed, followed by an overview of the measured plasma parameters in the HiPIMS discharge, the electron energy and density, the ion energy, ion flux and plasma composition, and a discussion on the deposition rate. Finally, some of the models that have been developed to gain understanding of the discharge processes are reviewed, including the phenomenological material pathway model, and the ionization region model.

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Section: Discharge Configurationmentioning

confidence: 99%

High power impulse magnetron sputtering discharge

Guðmundsson¹,

Brenning²,

Lundin³

et al. 2012

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

636

446

View full text Add to dashboard Cite

show abstract

“…The flowrate and partial pressure of N 2 may also play an important role in the deposition, as has been reported for pulsed DC CFUBMS system by Astrand et al 6 Moreover, it seems that variation in deposition temperature has almost no effect on coating thickness. Variation in surface roughness of all TiAlN coated samples is listed in Table 3.…”

Section: Resultsmentioning

confidence: 67%

Effect of deposition parameters on TiAlN coating using pulsed DC CFUBMS

Mandal

Beake

Paul

2013

Surface Engineering

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This paper aims to investigate the parametric effect of deposition and target frequency on the mechanical properties and machining performance of the TiAlN coatings deposited in a dual cathode pulsed dc CFUBMS system. Coating composition is not directly dependent on deposition temperature or target frequency individually but increase in both the parameters has led to Al rich coating. The coating thickness is influenced by target frequency only. The fatigue fracture resistance of the TiAlN coating has been evaluated by the nanoimpact test and it has been found to be at least as good as commercial Ti 0?5 Al 0?5 N coating deposited on cemented carbide. In dry machining SAE 1037 steel, it has been observed that the resistance to crater wear is influenced by target frequency. Simultaneous increase in the deposition temperature and target frequency has provided improved resistance to crater wear due to their favourable influence on the coating thickness and Al percentage.

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“…It may be noted that the roughness, as mentioned above, is the convolution of the shape and local roughness. The RMS roughness is mostly affected by the shape of the overlapping islands, of which the coatings are composed, and not by the local roughness of the individual islands, which was found to be several orders smaller compared with the roughness as mentioned above [14]. …”

Section: Resultsmentioning

confidence: 68%

Thermal stability of nitride solar selective absorbing coatings used in high temperature parabolic trough current

Lei

Liu

et al. 2010

Sci. China Technol. Sci.

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This paper reports a new efficient solar selective surface in high temperature application. The influence of the monolayer's microstructure and deposition rate was firstly discussed. Then the nitride nano-multilayer on the polished stainless steel (herein after referred as "SS") substrate was prepared with Ti and Al metal targets by DC. and R.F. magnetron co-sputtering. The samples were annealed in air at different temperatures ranging from 350 to 800°C for 2 h to evaluate their thermal stability. The samples' surface and cross-section morphology, crystal structure, phase composition, optical properties were analyzed by scanning electron microscopy, X-ray diffraction, UV-VIS-NIR spectrophotometer and infrared emissivity tester. The results show that the coatings exhibit high solar selectivity (α/ε) of 0.943/0.08 even after heat-treatment up to 400°C for 2 h in air. After heat-treatment at 600°C in air, the solar selectivity decreases to 0.92/0.16. solar energy, nitride coatings, solar absorptance, thermal emittance, thermal degradation Citation: Hao L, Du M, Liu X P, et al. Thermal stability of nitride solar selective absorbing coatings used in high temperature parabolic trough current. SciThe main requirements for the solar selective absorbing coatings used in high temperature parabolic trough current solar collectors must have high absorptance α in the solar spectral range (0.3-2.5 μm) and low emittance ε in the infrared region (2.5-50 μm). It can convert low solar energy density to high heat energy density, enrich solar energy and improve the efficiency of photothermal conversion, which is an important content in field of solar energy heat utilization. The ideal characteristics of a photothermal converter is approximated by an absorber reflector tandem. The reflector is coated with a layer which is highly absorbing over the visible region and transparent in the infrared region. Generally, the absorbers degrade at high operating temperature because of unstable microstructure, which causes a decrease in the solar selectivity.Based on the different of sunlight absorption and coatings' structure, the selective absorbing coatings are divided into different basic types, such as semiconductor coating, optical interference coating, multi-graded coating, metalceramic coating and porous coating. To obtain the spectral selectivity various concepts have been studied such as cermet coatings, absorber-reflector tandem and multilayer absorber. A large number of high temperature solar selective coatings have been studied such as M-Al 2 O 3 (M=Pt, Ni, Mo, Cu) cermets, M-AlN (M=W, Mo, stainless steel) cermets, etc. The metal-ceramic composite coating has good thermal stability, and it is mainly used in high-temperature fields. It is a newly developed coating in recent years. Cermet is the incorporation of metal particles and nitrides or oxides medium. Because of the transition zone of metals and the resonance of small particles, this coating has strong absorption of solar spectrum. Common metal particles are Cu, Au,

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Deposition of Ti1−xAlxN using bipolar pulsed dual magnetron sputtering

Cited by 16 publications

References 19 publications

High power impulse magnetron sputtering discharge

High power impulse magnetron sputtering discharge

Effect of deposition parameters on TiAlN coating using pulsed DC CFUBMS

Thermal stability of nitride solar selective absorbing coatings used in high temperature parabolic trough current

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