Deposition of ultrathin parylene C films in the range of 18nm to 142nm: Controlling the layer thickness and assessing the closeness of the deposited films

Rapp, Bastian E.; Voigt, A.; Dirschka, M.; Länge, Kerstin

doi:10.1016/j.tsf.2012.03.035

Cited by 22 publications

(27 citation statements)

References 25 publications

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“…The final thickness of the Parylene layer and the deposition rate are controlled by the initial mass of the dimer and the process pressure respectively. 21 We have characterized the surface morphology of both Parylenes deposited on SiO 2 /Si chips with the aid of an Atomic Force Microscope (AFM). As presented in Figure 4, a bare 84 nm thick SiO 2 has a RMS roughness value of 0.27 nm.…”

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confidence: 99%

Encapsulation of graphene in Parylene

Skoblin

Sun

Yurgens

2017

Applied Physics Letters

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Graphene encapsulated between flakes of hexagonal boron nitride (hBN) demonstrates the highest known mobility of charge carriers. However, the technology is not scalable to allow for arrays of devices. We are testing a potentially scalable technology for encapsulating graphene where we replace hBN with Parylene while still being able to make low-ohmic edge contacts. The resulting encapsulated devices show low parasitic doping and a robust Quantum Hall effect in relatively low magnetic fields <5 T. Published by AIP Publishing. [http://dx

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confidence: 99%

Encapsulation of graphene in Parylene

Skoblin

Sun

Yurgens

2017

Applied Physics Letters

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“…SAW devices were initially coated with 0.1 µm parylene C using a commercially available parylene deposition system (Labcoater 1, PDS 2010; Specialty Coating Systems, USA) as described earlier [16]. Parylene C coated SAW devices were activated by oxidation via plasma treatment and subsequent silanization by reaction with [3-(methacryloyloxy)propyl]trimethoxysilane for 1 h in the dark, following the silanization protocol commonly used in our group [17].…”

Section: Mpc Polymer Coating Of Saw Devicesmentioning

confidence: 99%

Acoustic Biosensors Coated With Phosphorylcholine Groups for Label-Free Detection of Human C-Reactive Protein in Serum

et al. 2015

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Mass-sensitive biosensor devices based on surface acoustic waves (SAWs) were coated with commercially available 2-methacryloyloxyethyl phosphorylcholine (MPC) polymer for label-free detection of the inflammatory marker C-reactive protein (CRP) in human serum. Owing to the phosphorylcholine groups, the MPC polymer coating enables both binding of CRP and reduction of nonspecific adsorption of other proteins. Hence, MPC offers a simple and economic method to prepare CRP-specific biosensing layers without the use of additional capture molecules. Direct detection and a binding inhibition assay test format were used, where the latter was applied to minimize effects from the serum sample matrix. MPC polymer coated SAW biosensors could be used with both test formats to differentiate CRP serum concentrations in the normal range (i.e., 10 mg/L and below) from significantly increased serum concentrations which would indicate bacterial infection, tissue injury, and inflammation.Index Terms-Biosensors, C-reactive protein (CRP), medical diagnosis, surface acoustic waves (SAW), surface treatment.

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“…Taking into account the mechanical stability and a production process for thin layers, we identified the group of parylenes to be an ideal material. Parylenes, based on xylylene or its halogenated derivates, are hydrophobic and transparent polymers, mainly used in industrial coating processes . They can be deposited as thin or ultra‐thin films on almost any vacuum compatible substrate.…”

Section: Foil Productionmentioning

confidence: 99%

“…In Ref. 23, deposition of ultra-thin Parylene C layers in the range of 18-140 nm has been studied, and it was found that minimal layer thickness resulting in a closed layer was 35 nm. Deposition of extremely thin layers of Parylene C (1.5 nm) and Parylene N (3 nm) is described in the patent.…”

Section: Foil Productionmentioning

confidence: 99%

Preparation and characterization of nanometer‐thin freestanding polymer foils for laser‐ion acceleration

Aurand

Elkin

Heim

et al. 2013

J Polym Sci B Polym Phys

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We report on the production and characterization of polymer-based ultra-thin (sub 10 nm) foils suited for experiments on laser-ion acceleration in the regime of radiation pressure acceleration. Beside the remarkable mechanical stability compared with commonly used diamond-like-carbon foils, a very homogeneous layer thickness and a small surface roughness have been achieved. We describe the technical issues of the production process as well as detailed studies of the mechanical stability and surface roughness tests. The capability of producing uniform targets of large area is essential for advanced laser-ion acceleration projects which are dealing with high repetition rate and extended measurement series, but might also be useful for other applications which require ultra-thin and freestanding substrates of high quality

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Deposition of ultrathin parylene C films in the range of 18nm to 142nm: Controlling the layer thickness and assessing the closeness of the deposited films

Cited by 22 publications

References 25 publications

Encapsulation of graphene in Parylene

Encapsulation of graphene in Parylene

Acoustic Biosensors Coated With Phosphorylcholine Groups for Label-Free Detection of Human C-Reactive Protein in Serum

Preparation and characterization of nanometer‐thin freestanding polymer foils for laser‐ion acceleration

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