1993
DOI: 10.1016/0257-8972(93)90146-f
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Deposition of wear resistant coatings based on diamond like carbon by unbalanced magnetron sputtering

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Cited by 175 publications
(42 citation statements)
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“…4,5 For the deposition of adherent DLC onto titanium, one of the more promising approaches involves TiN and TiC interlayers, to give a Ti-TiN-TiC-DLC multilayer structure. 6,7 The deposition of DLC, on a wide range of substrate materials, has received considerable attention in the literature. Favorable results have been reported for applications such as surgical needles for corneal surgery, 8 materials for total joint replacement, 3,9 orthopedic pins and screws, 10 dental prostheses, 11 medical guidewires, 12 heart valve replacements, 13 and rotary pumps for left ventricular assistance.…”
Section: Introductionmentioning
confidence: 99%
“…4,5 For the deposition of adherent DLC onto titanium, one of the more promising approaches involves TiN and TiC interlayers, to give a Ti-TiN-TiC-DLC multilayer structure. 6,7 The deposition of DLC, on a wide range of substrate materials, has received considerable attention in the literature. Favorable results have been reported for applications such as surgical needles for corneal surgery, 8 materials for total joint replacement, 3,9 orthopedic pins and screws, 10 dental prostheses, 11 medical guidewires, 12 heart valve replacements, 13 and rotary pumps for left ventricular assistance.…”
Section: Introductionmentioning
confidence: 99%
“…1 as a function of negative substrate bias. The N content decreases from about 22.96 to 20.62 at% while the C + Ru and Pt contents increase from about 76.62 to 78.70 at% and from about 0.42 to 0.68 at%, respectively, with increased negative substrate bias from 0 to -120 V. Since the kinetic energy of sputtered ions is proportional to substrate bias, the increased negative substrate bias accelerates the sputtered ions onto the film surfaces resulting in the proportionally increased C + Ru and Pt contents in the PtRuN-DLC films [24][25][26][27][28]. Compared to the ionization rate of N 2 gas inside the deposition chamber, the increased kinetic energies of the C, Pt and Ru ions with increased negative substrate bias reduce the N content in the PtRuN-DLC films.…”
Section: Resultsmentioning
confidence: 98%
“…These fluctuations are due to the constant breakage and re-forming of the passive oxide layer on the surface. The ratio of worn and unworn areas, in particular, if the extent of the worn area increases, the OCP of the samples will shift depending on the controlling electrochemical processes, being either anodic (e.g., the dissolution of the metal) or the cathodic reaction (e.g., the reduction of hydrogen or dissolved oxygen) [32]. On the other hand, the OCP values of the coated sample exhibited more noble values than the uncoated samples.…”
Section: Results Of Tribo-corrosion Testmentioning
confidence: 99%
“…The use of MAO has been increasing day by day to improve wear resistance, corrosion resistance, and load carrying capacity of the Titanium surface and its alloys [32][33][34][35]. A ceramic oxide layer, which is relatively thick (approximately 150 lm), hard, high wear resistant, and with excellent adhesion to the substrate, is able to achieve success by using this method.…”
Section: Introductionmentioning
confidence: 99%