Depth dependence of radiation damage in Li+-implanted KTiOPO4

Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

“…Ion implantation stands among these techniques because it allows an accurate control of the waveguides refractive index profiles by selecting the species, energies and fluences of the incident ions. Fabrication of waveguides on KTP by ion implantation have been reported using H + , He + (Schrempel et al, 2004;Chen et al, 2008d;Dong et al, 2011b), C 3+ , N + , B + (Wesch et al, 2001) and Li + (Schrempel et al, 2002).…”

MeV He ion-implanted planar waveguide in RTP crystal

“…Planar waveguides in KTP have been produced by several methods, e.g., ion exchange [5], ion implantation [6][7][8], and pulsed laser deposition (PLD) [9]. But little work was reported about the RTP waveguides.…”

Annealing Characters of KTP Crystal Formed with He+-Ions at High Dose and Low Energy

“…At present, waveguides in KTP have been fabricated by both the light ions such as H [8], He [9][10][11][12][13][14][15][16] and the heavy or medium ions such as Ni [17], P [18], Li [15,19], Si [20], or C [21], etc.…”

“…Several experimental results [9,14,[16][17][18][19][20] have shown that the surface refractive index n x and n z in guide region can be increased and waveguide quality can be improved after suitable annealing treatment. In this paper, we will report the KTP crystal implanted by 150KeV He + ions with 8×10 16 ions/cm 2 , and analyze the refractive index profiles in the crystal after a set of thermal annealing under suitable conditions.…”