Depth Dependence of Time Delay Effect on Hydrogen Silsesquioxane (HSQ) Resist Layers

Dinh, Cong Que; Oshima, Akira; Tagawa, Seiichi

doi:10.2494/photopolymer.25.121

Cited by 3 publications

(2 citation statements)

References 7 publications

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“…It must be noted that silver is selected as a metal cap layer due to its smallest total damping rate (Γ = 0.02 eV), lowest loss, much better surface plasmon polariton (SPP) confinement at telecommunication wavelengths, highest SPP quality factor in visible and near-infrared regions, and low fabrication cost 20 . In addition, HSQ as an amorphous structure similar to silica with a good adhesion on silicon wafers, is a good candidate for the low-index layer of the proposed HPW due to some advantages including high uniformity, high etching resistance, high resolution, and minimum line edge roughness 21 . Distribution of the electric field y-component (|E y |) of the fundamental quasi-TM mode at 1550 nm (193.5 THz) is depicted in Fig.…”

Section: Hybrid Plasmonic Waveguidementioning

confidence: 99%

Controllable hybrid plasmonic integrated circuit

Khodadadi

Moshiri

Nozhat

et al. 2023

Sci Rep

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In this paper, a controllable hybrid plasmonic integrated circuit (CHPIC) composed of hybrid plasmonic waveguide (HPW)-based rhombic nano-antenna, polarization beam splitter, coupler, filter, and sensor has been designed and investigated for the first time. In order to control the power into a corresponding input port, a graphene-based 1 × 3 power splitter with switchable output has been exploited. The functionality of each device has been studied comprehensively based on the finite element method and the advantages over state-of-the-art have been compared. Moreover, the effect of connection of CHPIC to the photonic and plasmonic waveguides has been studied to exhibit the capability of variety excitation methods of the CHPIC. Furthermore, the performance of the proposed CHPIC connected to inter/intra wireless transmission links has been investigated. The wireless transmission link consists of two HPW-based nano-antennas as transmitter and receiver with the maximum gain and directivity of 10 dB and 10.2 dBi, respectively, at 193.5 THz. The suggested CHPIC can be used for applications such as optical wireless communication and inter/intra-chip optical interconnects.

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Section: Hybrid Plasmonic Waveguidementioning

confidence: 99%

Controllable hybrid plasmonic integrated circuit

Khodadadi

Moshiri

Nozhat

et al. 2023

Sci Rep

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show abstract

“…Ekinci et al reported that ultimate resolution limit of HSQ material has marked the world record as narrow as 7nm HP LS although high energy EUV dose was required [44]. Dinh et al noticed that film quality after coating was of great concern [45], but HSQ resist still attracts researchers' attention.…”

Section: Hydrosilsesquioxanes (Hsq)mentioning

confidence: 99%

Recent EUV Resists toward High Volume Manufacturing

Nakagawa¹,

Naruoka²,

Nagai³

2014

J. Photopol. Sci. Technol.

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Extreme ultraviolet lithography (EUVL) has been an attractive method as next generation lithography (NGL) over 20 years, and high-volume manufacturing (HVM) is now going to be realized by great progresses in materials as well as EUV source power enhancement. In this paper, recent reported materials for EUVL are summarized ranging from conventional organic material base resists to novel inorganic material base resists.

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Hybrid plasmonic rhombic nano-antenna with a dielectric director

Khodadadi¹,

Moshiri²,

Nozhat³

et al. 2023

Opt. Mater. Express

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In this paper, for the first time, the idea of a dielectric director has been utilized to improve the directivity and gain of the proposed hybrid plasmonic rhombic nano-antenna (HPRNA). The proposed HPRNA can support a horizontal radiation pattern to flourish the concept of wireless transmission link. The horizontal radiation pattern has a 3 dB beamwidth of 43.5°, side lobe level of −11.9 dB, and a directivity and gain of 10.5 dBi and 10.3 dB, respectively, at the operating frequency of 193.5 THz. Moreover, the effects of geometric parameters to verify the functionality of the proposed nano-antenna have been investigated. Finally, the idea of an on-chip wireless transmission link based on transmitting and receiving HPRNAs has been developed and studied theoretically and numerically. The fabrication of the proposed nano-antenna can be done by the typical e-beam lithography (EBL) technique, which is easier than the complicated X-ray method because of its suitable aspect ratio.

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Depth Dependence of Time Delay Effect on Hydrogen Silsesquioxane (HSQ) Resist Layers

Cited by 3 publications

References 7 publications

Controllable hybrid plasmonic integrated circuit

Controllable hybrid plasmonic integrated circuit

Recent EUV Resists toward High Volume Manufacturing

Hybrid plasmonic rhombic nano-antenna with a dielectric director

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