The role of the location of energy deposition during cluster ion bombardment on the quality of molecular depth profiling was examined by varying the incident angle geometry. Cholesterol films ∼300 nm in thickness deposited onto silicon substrates were eroded using 40-keV C 60 + at incident angles ranging from 5° to 73° with respect to the surface normal. The erosion process was evaluated by determining at each incident angle the total sputtering yield of cholesterol molecules, the damage cross section of the cholesterol molecules, the altered layer thickness within the solid, the sputter yield decay in the quasi-steady-state sputter regime, and the interface width between the cholesterol film and the silicon substrate. The results show that the total sputtering yield is largest relative to the product of the damage cross section and the altered layer thickness at 73° incidence, suggesting that the amount of chemical damage accumulated is least when glancing incident geometries are used. Moreover, the signal decay in the quasi-steady-state sputter regime is observed to be smallest at offnormal and glancing incident geometries. To elucidate the signal decay at near-normal incidence, an extension to an erosion model is introduced in which a fluence-dependent decay in sputter yield is incorporated for the quasi-steady-state regime. Last, interface width calculations indicate that at glancing incidence the damaged depth within the solid is smallest. Collectively, the measurements suggest that decreased chemical damage is not necessarily dependent upon an increased sputter yield or a decreased damage cross section but instead dependent upon depositing the incident energy nearer the solid surface resulting in a smaller altered layer thickness. Hence, glancing incident angles are best suited for maintaining chemical information during molecular depth profiling using 40-keV C 60 + .The addition of cluster ion beam sources to traditional secondary ion mass spectrometry (SIMS) experiments has expanded the options for new applications. 1-5 One of the most important observations associated with these projectiles is that there is often very little chemical damage buildup during the interaction of the cluster with a molecular solid. 1-10 This effect is generally different from the behavior observed using atomic projectiles where damage buildup is usually quite severe, and the experiments must be carried out in either a low dose or very low kinetic energy (>200 eV) mode in order to retain the desired spectral information. [1][2][3][4][5]8,10,11 The high cleanup efficiency of cluster projectiles opens the possibility of molecular depth profiling through molecular solids, with many examples being reported in the past few years. 6-10,12-18 Buckminsterfullerene (C 60 ) has been shown to be particularly effective in this regard, although other cluster projectiles have also been shown to yield acceptable results. 12,14,16 If the cluster beam is focused to a submicrometer spot, it is feasible to create three-dimensional * To...