2015
DOI: 10.1039/c4ja00461b
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Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Abstract: Depth-profiling measurements by means of synchrotron radiation based grazing XRF techniques, i.e., grazing emission X-ray fluorescence (GEXRF) and grazing incidence X-ray fluorescence (GIXRF), present a promising approach for the non-destructive, sub-nanometer scale precision characterization of ultra shallow ion-implantations. The nanometer resolution is of importance with respect to actual semiconductor applications where the down-scaling of the device dimensions requires the doping of shallower depth ranges… Show more

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Cited by 18 publications
(19 citation statements)
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References 83 publications
(112 reference statements)
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“…They have found application in many disciplines, e.g., biology6, materials science7, earth science8, investigations of cultural heritage9 and forensic science10. A polycapillary optics consists of up to one million hollow, curved and tapered glass capillaries, in which X-rays are transmitted by means of multiple total external reflections.…”
mentioning
confidence: 99%
See 1 more Smart Citation
“…They have found application in many disciplines, e.g., biology6, materials science7, earth science8, investigations of cultural heritage9 and forensic science10. A polycapillary optics consists of up to one million hollow, curved and tapered glass capillaries, in which X-rays are transmitted by means of multiple total external reflections.…”
mentioning
confidence: 99%
“…Polycapillary focusing elements 1 are frequently used in X-ray analysis for chemical mapping 2 , microimaging 3 , depth profiling 4 and X-ray spectroscopy 5 . They have found application in many disciplines, e.g., biology 6 , materials science 7 , earth science 8 , investigations of cultural heritage 9 and forensic science 10 . A polycapillary optics consists of up to one million hollow, curved and tapered glass capillaries, in which X-rays are transmitted by means of multiple total external reflections.…”
mentioning
confidence: 99%
“…In this work, we take advantage of this effect by setting the incident angles less than the critical angle of the Pd substrate so that the standing wave effect dominates and thus the enhanced and spatially modulated E-field above the substrate can be used as a highly sensitive probe for the nanostructures. In contrast, in the grazing-exit configuration, GEXRF (grazing-exit X-ray fluorescence) that is often used for low-level chemical impurity detection [35][36][37][38] , the external beam often impinges normal to the sample, eliminating the need for beam collimation and sample surface alignment. With efficient area pixel-array detectors, the fluorescence holographical cones can be quickly measured without the need of scanning the detector position and still give sufficient angular resolution near the grazing-exit angles.…”
Section: Discussionmentioning
confidence: 99%
“…The feasibility of mapping in the grazing emission geometry was demonstrated in refs. [59‐61]. At synchrotron radiation sources, GEXRF can be combined in addition with XAS which allows to study, for example, the local electronic structure of implanted dopants.…”
Section: Gexrf Instrumentationmentioning
confidence: 99%