Depth resolution of TOF-ERDA using a He beam

Yasuda, Keisuke; Batchuluun, Chuluunbaatar; Ishigami, Ryoya; Hibi, S.

doi:10.1016/j.nimb.2010.11.092

Cited by 7 publications

(5 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The TOF is determined by time information of the transmission and the energy detectors. The surface depth resolution reaches 6.0 nm with the 3.5 MeV He beam [7].…”

Section: Prototype Tof-erda Systemmentioning

confidence: 95%

See 1 more Smart Citation

Quantitative Ion Beam Analysis for Light Elements using In-air and High Depth Resolution Systems

Suzuki

Ishigami

Yasunaga

et al. 2020

Trans. Mat. Res. Soc. Japan

View full text Add to dashboard Cite

Ion beam is used for quantitative element analysis. In the Wakasa Wan Energy Research Center (WERC), various types of ion beam analysis; Particle Induced X-ray Emission (PIXE), Rutherford Backscattering Spectrometry (RBS), and Elastic Recoil Detection Analysis (ERDA), have been performed with a 5 MV tandem accelerator. Recently, in-air and time-of-flight systems have been developed in WERC. The in-air measurement is required often for hydrogen storage materials to determine hydrogen quantity. Hydrogen quantities of magnesium-hydride (MgHx) thin films after production and after hydrogen absorption by magnetron sputtering were measured by the in-air system. The time-of-flight (TOF) ERDA measurement is useful for multi element simultaneous analysis with high depth resolution. The TiO2 thin film of 10 nm thickness has been measured with the TOF ERDA system.

show abstract

“…The TOF is determined by time information of the transmission and the energy detectors. The surface depth resolution reaches 6.0 nm with the 3.5 MeV He beam [7].…”

Section: Prototype Tof-erda Systemmentioning

confidence: 95%

“…When high energy beam is used, the cross section deviates from Rutherford scattering. Cross sections of He-14 N and He- 7 Li were observed for TOF-ERDA measurements [10][11].…”

Section: Developments Of Tof-erda Techniquesmentioning

confidence: 99%

Quantitative Ion Beam Analysis for Light Elements using In-air and High Depth Resolution Systems

Suzuki

Ishigami

Yasunaga

et al. 2020

Trans. Mat. Res. Soc. Japan

View full text Add to dashboard Cite

show abstract

“…In TOF-ERDA measurements, heavy ions such as chlorine, copper, bromine, iodine and gold are often used as the incident beam [4][5][6][7][8][9]. However, light ions such as helium can also be used [21,22] in measurements. In this case, cross section data are required for quantitative analysis [23].…”

Section: Overviewmentioning

confidence: 99%

“…From Equations (22) and 23, BG scat (C)/BG acc (C) ≈ 0.3 is evaluated. This indicates that the background from scattered carbon events is about 30% of the background from the accidental coincidence.…”

Section: Sensitivitymentioning

confidence: 99%

Time-Of-Flight ERDA for Depth Profiling of Light Elements

Yasuda

2020

QuBS

View full text Add to dashboard Cite

The time-of-flight elastic recoil detection analysis (TOF-ERDA) method is one of the ion beam analysis methods that is capable of analyzing light elements in a sample with excellent depth resolution. In this method, simultaneous measurements of recoil ion energy and time of flight are performed, and ion mass is evaluated. The energy of recoil ions is calculated from TOF, which gives better energy resolution than conventional Silicon semiconductor detectors (SSDs). TOF-ERDA is expected to be particularly applicable for the analysis of light elements in thin films. In this review, the principle of TOF-ERDA measurement and details of the measurement equipment along with the performance of the instrumentation, including depth resolution and measurement sensitivity, are described. Examples of TOF-ERDA analysis are presented with a focus on the results obtained from the measurement system developed by the author.

show abstract

“…Raman spectroscopy, IR spectroscopy, NMR, EELS, SIMS, and TOF-SIMS provide specic structural characterization and estimation of hydrogen contents in DLC lms. 1 Nuclear reaction analysis (NRA) and elastic recoil detection analysis (ERDA) [8][9][10] have been widely used for direct hydrogen quantication in DLC lms, though they require special facilities. In ERDA, a hydrogen atom is struck out of the target sample using ion beam radiation and then the hydrogen atom energy is detected using a solid state detector.…”

Section: Introductionmentioning

confidence: 99%