Derivative method for dual-wavelength three-frame phase-shifting interferometry

Xu, Yuanyuan; Yu, Liang; Yang, Zhongmin; Shen, Qibao; Xue, Shuangshuang; Wang, Yawei; Zhu, Shining

doi:10.1016/j.ijleo.2020.165953

Cited by 7 publications

(1 citation statement)

References 19 publications

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“…By keeping the phase difference of two single wavelengths constant and detecting the nano displacement of a single wavelength, the long-distance measurement of the synthetic wavelength can be realized. In this paper, to make the TIE method suitable for solving the phase under conditions of multiwavelength illumination, the concept of multiwavelength synthesis wavelength 14 , 21 – 23 is introduced. we need to consider the constraint relationships between the corresponding phase distributions under the influence of different wavelengths, e.g., λ1,λ2,λ3.…”

Section: Phase Retrieval In Multiwavelength Light Fieldsmentioning

confidence: 99%

Binocular phase retrieval based on the transport of intensity equation under multiwavelength illumination

Chen

Zhang

et al. 2022

Opt. Eng.

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In view of the limitation that the transport of intensity equation method can only be used at a single wavelength, we propose a binocular phase retrieval algorithm based on multiwavelength illumination. First, we solve for the corresponding single-phase results at different wavelengths and then calculate the surface height of the object by combining the obtained synthetic wavelengths and synthetic phases, in order to reconstruct the initial phase results at different wavelengths. To solve the problem of amplification of traditional noise and surface profile noise in the phase diagram in the phase synthesis step, we introduce a step-by-step noise reduction method that can reduce the noise in the initial phase results to the level for a single wavelength and finally obtain the corresponding high-precision phase results at different wavelengths. The intensity images collected by the proposed dual-microscope system verify the correctness and effectiveness of the algorithm.

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