Diethyl phosphonates and tetraethyl alkyldiphosphonates were efficiently and rapidly prepared via the Michaelis–Becker reaction, under microwave irradiation. These compounds were then hydrolyzed to phosphonic and diphosphonic acids or selectively monodealkylated to give monoesters of phosphonic acids and symmetrical diethyl esters of diphosphonic acids. These reactions were also achieved rapidly in satisfactory yields with microwave methodology. This methodology was applied with success to the functionalization of a polymer resin. © 2009 Wiley Periodicals, Inc. Heteroatom Chem 20:369–377, 2009; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/hc.20561