Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Huang, Hu; Zhao, Hongwei; Yang, Zhaojun; Fan, Zunqiang; Wan, Shengpeng; Shi, Changwei; Ma, Zhichao

doi:10.3390/s120709697

Cited by 18 publications

(8 citation statements)

References 23 publications

(21 reference statements)

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“…A piezoelectric motor has the advantages of a simple structure, convenient control, easy miniaturization, a high displacement resolution, a fast response speed, and miniature precision actuation, which has been widely studied by many researchers [ 1 , 2 ]. According to the working principle, piezoelectric motors can be roughly divided into four types [ 3 , 4 , 5 , 6 , 7 , 8 ], including standing wave, travelling wave, inchworm, and impact motors.…”

Section: Introductionmentioning

confidence: 99%

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

Han

Xia

et al. 2018

Sensors

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This paper presents a novel impact rotary motor based on a piezoelectric tube actuator with helical interdigitated electrodes which has a compact structure and high resolution. The assembled prototype motor has a maximum diameter of 15 mm and a length of 65 mm and works under a saw-shaped driving voltage. The LuGre friction model is adopted to analyze the rotary motion process of the motor in the dynamic simulations. From the experimental tests, the first torsional resonant frequency of the piezoelectric tube is 59.289 kHz with a free boundary condition. A series of experiments about the stepping characteristics of different driving voltages, duty cycles, and working frequencies are carried out by a laser Doppler vibrometer based on a fabricated prototype motor. The experimental results show that the prototype rotary motor can produce a maximum torsional angle of about 0.03° using a driving voltage of 480 Vp-p (peak-to-peak driving voltage) with a duty ratio of 0% under a small friction force of about 0.1 N. The motor can produce a maximum average angle of about 2.55 rad/s and a stall torque of 0.4 mN∙m at 8 kHz using a driving voltage of 640 Vp-p with a duty ratio of 0% under a large friction force of about 3.6 N. The prototype can be driven in forward and backward motion and is working in stick-slip mode at low frequencies and slip-slip mode at high frequencies.

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Section: Introductionmentioning

confidence: 99%

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

Han

Xia

et al. 2018

Sensors

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“…Piezoresistive strain gauge elements have also been used to measure displacement in nanopositioners [11]- [13]. To do this, one normally needs to glue multiple strain gauges to the suspension beams, configure them in a Wheatstone bridge, and use DC power supplies and amplifiers to generate an output signal [14]- [16]. In addition, installation of conventional gauges on suspension beams is usually manual and can introduce undesirable asymmetry in the nanopositioner structure (especially for those with smaller dimensions), which is normally designed symmetrical (to reduce cross-coupling) and is fabricated by high precision automated machines.…”

Section: Introductionmentioning

confidence: 99%

Non-Collocated Displacement Sensing by Semiconductor Strain Gauges in Differentially Piezo-Driven Nanopositioners

et al. 2021

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We address design, implementation, and characterization of semiconductor strain gauges as stage displacement sensors with small footprint for piezo-driven nanopositioners in differential actuation mode. The strain gauges are not collocated with the stage of the nanopositioner. They are attached to piezo stack actuators in both longitudinal and transverse directions. We address two differential configurations for the displacement sensing. The first configuration uses all strain gauges and provides three output signals. Two of them are proportional to the length variations of the piezo actuators, which are considered as conventional non-differential sensing method. The last output in the first configuration is the first proposed differential sensor. In the second configuration, we propose an alternative differential sensor using only the longitudinal strain gauges and a simpler readout circuit. The results indicate that in the differential actuation mode, a differential sensing strategy provides much better accuracy than the conventional non-differential schemes. Using a laser interferometer as an independent collocated sensor for stage displacement, we obtained constant calibration factors both proposed differential sensors and characterized their sensing accuracies.

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“…As the roles of nano actuators in most occasions are served by piezoelectric actuators(PEA) that deforms on principle of converse piezoelectric effect [15], measuring the strain when the PEA stretches and retracts is also a feasible way to acquire displacement. Corresponding approaches include strain gauge based methods [16], [17] and selfsensing methods [18]- [21]. With resistance changing along with deformation, strain gauges are low-cost, small-volume and easy to be mounted without strict requirement of assembly precision.…”

Section: Introductionmentioning

confidence: 99%

A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion

Zhou

Zhang

et al. 2019

IEEE Access

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Accurate and rapid measuring methods for displacement of nano-scale is necessary for manipulation. Self-sensing and time-digit-conversion(TDC) are two applicable measuring methods especially suitable for room-limited workspaces and vacuum-compliance required applications, thanks to their spacesaving advantage and slight thermal impact on system. The self-sensing method gives measurements in high resolution at high sampling rate but its accuracy suffers from nonlinearity, while TDC has better linearity which causes less deviation to results but has a much lower sampling rate. A Kalman filter based fusion approach with dual estimation modes and self-adaptive parameters is designed to fuse the two measurements with different sampling rates at a higher frequency. Modifications to error covariance parameters are applied to traditional Kalman filter so that sensors' generalized errors rather than their Gaussian noises are taken into consideration, and corresponding derivation is given. A series of experiments are conducted to evaluate the performance of the fused measurement.INDEX TERMS Nano-scale measurement, multi-rate fusion, self-sensing, TDC.

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Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Cited by 18 publications

References 23 publications

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

A Compact Impact Rotary Motor Based on a Piezoelectric Tube Actuator with Helical Interdigitated Electrodes

Non-Collocated Displacement Sensing by Semiconductor Strain Gauges in Differentially Piezo-Driven Nanopositioners

A Measuring Method for Nano Displacement Based on Fusing Data of Self-Sensing and Time-Digit-Conversion

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