Design and analysis of a RF MEMS shunt switch using U-shaped meanders for low actuation voltage

Shanthi, G.; Rao, K. Srinivasa; Sravani, K. Girija

doi:10.1007/s00542-020-04864-z

Cited by 17 publications

(5 citation statements)

References 19 publications

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“…T A B L E 3 Operating characteristics of the proposed switch respect to some newly published works Sravani et al 19 Molaei and Ganji 37 Goel et al 4 Sravani et al 20 Shanthi et al 29 Bansal et al 38 Deng et al 39 This…”

Section: Discussionmentioning

confidence: 94%

“…In summary, the moveable part of the switch is suspended over the substrate by four meandered springs. Based on this, the required force for deflection of moveable part in the Y ‐axis orientation in order to reach the T‐line should be higher than the spring restoring force which can be calculated as follows 29 :

F_{Spring restoring force} goodbreak= K_{springs} goodbreak\times normalΔ L

where

normalΔ L

is the gap between the switching tip and T‐line (the gap that moveable part needs to travel to reach the T‐line and make the switch ON). On the other hand, once application of a voltage to the pads of the V‐shaped (electrothermal) actuator, its central part pulls the moveable part in the Y ‐axis orientation.…”

Section: Design and Analysis Of Electrothermal Actuatormentioning

confidence: 99%

“…In summary, the moveable part of the switch is suspended over the substrate by four meandered springs. Based on this, the required force for deflection of moveable part in the Y-axis orientation in order to reach the T-line should be higher than the spring restoring force which can be calculated as follows 29 :…”

Section: Design and Analysis Of Electrothermal Actuatormentioning

confidence: 99%

See 2 more Smart Citations

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Dadgar

Aghdam

2022

Circuit Theory & Apps

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A new structure for low‐loss and high‐isolation radio‐frequency microelectromechanical systems (RF MEMS) switches is presented. The high contact force of the switch leads to very small ranges for contact resistance which is the main constrain of DC‐contact RF MEMS switches. The contact resistance of the switch is 27 mΩ leading to negligible thermal noise which is one of the most important parameters for devices operating at RF front‐ends immediately after the antenna where there is not any active stage. The switch is composed of two actuators: an electrothermal actuator for actuation of the switch from OFF to ON state and an electrostatic actuator to hold the switch at ON state. The insertion loss, return loss, and isolation of the switch for frequencies below 70 GHz are −0.35, −20, and −10 dB, respectively. The contact force and contact resistance of the switch are 0.93 mN and 0.027 Ω, respectively. Electrothermal and electrostatic actuators require 0.91 and 50 actuation voltages, respectively. During the ON‐state, the power consumption of the switch is near zero. The low contact resistance and high‐isolation characteristics of the switch make it very suitable for mobile front‐ends.

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Section: Discussionmentioning

confidence: 94%

F_{Spring restoring force} goodbreak= K_{springs} goodbreak\times normalΔ L

where

normalΔ L

Section: Design and Analysis Of Electrothermal Actuatormentioning

confidence: 99%

Section: Design and Analysis Of Electrothermal Actuatormentioning

confidence: 99%

See 1 more Smart Citation

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Dadgar

Aghdam

2022

Circuit Theory & Apps

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“…In another approach, a silicon photonics MEMS switch was designed and fabricated, capable of operating at as low as 3.75 V [22]. Shunti et al, in [23], focused on the introduction of an RF MEMS shunt switch that featured a low pull-in voltage of 5.2 V, achieved through the use of U-shaped meanders. Zhu and Pal, in [24], explored the application of combined electrostatic and electrothermal actuation to create a highly reliable RF MEMS switch that operates at low voltages.…”

Section: Introductionmentioning

confidence: 99%

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Allameh,

Park,

Shafai

2024

Sensors

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MEMS electrostatic actuators can suffer from a high control voltage and a limited displacement range, which are made more prevalent by the pull-in effect. This study explores a tri-electrode topology to enable a reduction in the control voltage and explores the effect of various solid materials forming the space between the two underlying stationary electrodes. Employing solid dielectric material simplifies fabrication and can reduce the bottom primary electrode’s fixed voltage. Through numerical analysis, different materials were examined to assess their impact. The results indicate that the primary electrode’s fixed voltage can be reduced with an increase in the dielectric constant, however, with the consequence of reduced benefit to control voltage reduction. Additionally, charge analysis was conducted to compare the actuator’s performance using air as the gap-spacing material versus solid materials, from the perspective of energy conservation. It was found that solid materials result in a higher accumulated charge, reducing the need for a high fixed voltage.

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“…Meander structures are used in many microwave devices [1][2][3]. The most common application areas for meander structures are antennas [4], antenna arrays [5], phase shifters [6], filters [7], and slow-wave structures. Meander structures are also used in resonator designs [8], pulse-forming lines [9], meandered superinductors [10], and others.…”

Section: Introductionmentioning

confidence: 99%

Analysis of Hybrid Meander Structures with Additional Shields

2021

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Models of hybrid meander structures with additional shields are presented in this paper. The influence of additional shields and their grounding positions on the electromagnetic characteristics of the hybrid meander structures was investigated. Three-dimensional models were created and analyzed using the method of moments (MoM) in the Sonnet® and finite-difference time-domain (FDTD) method in CST Microwave Studio® commercial software packages. The computer-based modeling was verified by physical experiment. The analysis showed that it is possible to control the delay time characteristic using different values of lumped inductive elements without the need to change the overall size of the hybrid meander structure. The delay time varied by 1.2 ns in the range of 1.3 ns to 2.5 ns when the inductivity changed from 1 nH to 10 nH in our investigation. On the other hand, the passband decreased from 2.384 GHz to 0.508 GHz. The additional shields and their grounding positions allowed for increasing the passband by up to 1.6%.

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Design and analysis of a RF MEMS shunt switch using U-shaped meanders for low actuation voltage

Cited by 17 publications

References 19 publications

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

A high contact force and high‐isolation radio‐frequency microelectromechanical systems switch for radio‐frequency front‐end applications

Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator

Analysis of Hybrid Meander Structures with Additional Shields

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