Design and analysis of a MEMS pressure sensor with a bossed membrane and ancillary bi-functional frog arm structure for low pressure measurement

Sahay, Rohan; Jindal, Sumit Kumar

doi:10.1007/s10825-021-01660-4

Cited by 5 publications

(1 citation statement)

References 13 publications

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“…Ideal for electric field measurement sensors. MEMS sensors have significant application effects in the fields of temperature detection (Ando et al, 2011;Frantlovic et al, 2016), pressure measurement (Nag et al, 2020;Sahay and Jindal, 2021), and humidity detection (Chen et al, 2016;Zhao et al, 2021), and are gradually becoming the development direction and research focus of electric field sensors. At present, the miniature electric field sensor based on MEMS technology is mainly based on the resonant structure of the charge sensing principle (KAINZ et al, 2018;Shanhong et al, 2021), All induction designs have shield plates moving above the induction electrode and shielding electrode by moving laterally.…”

Section: Introductionmentioning

confidence: 99%

Structural optimization and simulation of piezoelectric- piezoresistive coupled MEMS steady-state electric field sensor

Liu

Luo

et al. 2023

Front. Energy Res.

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In view of the problems of large volume, high energy consumption and difficult maintenance of electric field measurement sensors in existing power systems, non-contact miniature electric field sensors have become a hot topic in current research. In this paper, a MEMS miniature electric field measurement sensor model based on the principle of piezoelectric-piezoresistive coupling is constructed, and the sensor structure is optimized by analyzing the steady-state characteristics of the piezoelectric material and semiconductor membrane of the sensor. The input and output characteristics of the sensor were tested. The test results show that the sensor has excellent mechanical strain capacity, and the output voltage of the sensor has a linear relationship with the electric field strength, thus verifying the feasibility of the sensor measurement in the electric field. The research results will provide some reference for the development of contactless coupled sensors.

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