Design and Analysis of a Moems Gyroscope Based on a Ring-Shaped Hybrid Structure

Gholinejad, Jalal; Abedi, Kambiz

doi:10.2139/ssrn.4250178

Cited by 2 publications

(1 citation statement)

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“…Generally, MEMS/MOEMS gyroscopes can be divided into electrostatic driving [17], piezoelectric driving [18], and electromagnetic driving [19], in terms of the driving methods; and can be divided into capacitance sensing [20], current sensing [21], resistance sensing [22], frequency sensing [9], and tunnel effect sensing [23], in terms of the sensing methods; and also can be divided into vibration type [24] and rotor type [25], from the structure difference. The vibration-type silicon micro-gyroscope can also be further divided into linear vibration [26] and angular vibration [27].…”

Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Design of an integrable double-sided optoplasmonic gyroscope via a bent hybrid structure

Gholinejad,

Abedi

2024

Sci Rep

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This paper presents an optoplasmonic gyroscope that employs a novel bent-hybrid structure, and works double-sided. The proposed device is integrable without moving parts, and simply has a robust configuration. The detection mechanism is based on surface plasmon polaritons (SPPs), and the sensor consists of a laser, a bent-metal layer, and a photo-detector (PD). Based on the simulations, the proposed gyroscope provides significant characteristics of a measurement range of ± 45000°/s, an optical sensitivity of 6.025 µ/(°/s), a total sensitivity of 2.41 µA/W(°/s), an ultra-high resolution ability of 16.598 µ°/s, and an accuracy of 99.999%. The dimensions are 5 × 5 × 5 µm3, and the measurement time is 1 ms. The operational wavelength is at visible range of λ = 630 nm. Additionally, the effects of various parameters, including metal material, metal thickness, and laser wavelength, on the gyroscope performance are comprehensively studied.

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Design and Analysis of a Moems Gyroscope Based on a Ring-Shaped Hybrid Structure

Cited by 2 publications

References 0 publications

MEMS and MOEMS Gyroscopes: A Review

MEMS and MOEMS Gyroscopes: A Review

Design of an integrable double-sided optoplasmonic gyroscope via a bent hybrid structure

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