International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications 2013
DOI: 10.1117/12.2040172
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Design and analysis of displacement measurement system based on the four-quadrant detector

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Cited by 3 publications
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“…In a previous paper [1], we demonstrated that the technique was capable of sensing lateral movements of less than 0.3 μm in air with the detector. This is consistent with other published results [23,24] and commercial products [25]. If the optical lever arm has a length z 0.25 m, the minimum detectable beam deflection is 68 μdeg.…”
Section: Detection Sensitivitysupporting
confidence: 92%
“…In a previous paper [1], we demonstrated that the technique was capable of sensing lateral movements of less than 0.3 μm in air with the detector. This is consistent with other published results [23,24] and commercial products [25]. If the optical lever arm has a length z 0.25 m, the minimum detectable beam deflection is 68 μdeg.…”
Section: Detection Sensitivitysupporting
confidence: 92%