2014
DOI: 10.9790/4200-04434651
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Design and Analysis of Electro thermally Actuated Microgripper

Abstract: Micro-Electro-Mechanical Systems (MEMS)

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Cited by 4 publications
(2 citation statements)
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“…Ansys multiphysics module is used to model the actuator and enables the investigation of displacements and temperature fields. The developed finite element model comprises 16,325 nodes, each with five degrees of freedom, 10,993 triangular elements, and 10,993 triangular elements [56]. The actuator's surface temperature distribution is shown in Figure 17.…”
Section: Modeling and Analysis In Ansysmentioning
confidence: 99%
“…Ansys multiphysics module is used to model the actuator and enables the investigation of displacements and temperature fields. The developed finite element model comprises 16,325 nodes, each with five degrees of freedom, 10,993 triangular elements, and 10,993 triangular elements [56]. The actuator's surface temperature distribution is shown in Figure 17.…”
Section: Modeling and Analysis In Ansysmentioning
confidence: 99%
“…The beams can be with various structures allowing a lot of room for multi-DOF designs and out of plane designs. The V-shaped [ 35 ], Z-shaped [ 36 ], and U-shaped [ 37 ] beams are three most common electro-thermal actuator types among the microgripper designs in literature. However, the V-, Z-, and U-shaped actuators are limited to provide only one DOF and in-plane motion.…”
Section: Introductionmentioning
confidence: 99%