Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO&amp;lt;sub&amp;gt;3&amp;lt;/sub&amp;gt;) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric  Vibration Energy Harvesters Using  COMSOL Multiphysics Software

Alsaad, Ahmad; Al‐Bataineh, Qais M.; Daoud, Nermeen S.; Khazaleh, Mais H.

doi:10.4236/ojapps.2019.94016

Cited by 9 publications

(2 citation statements)

References 30 publications

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“…The technique of piezoelectric deposition comprises of various processes, such as sputtering techniques [108][109][110], chemical vapour deposition (CVD) methods [111] and spin on sol-gel deposition [112]. RF Magnetron sputtering process capable in preparing a highly aligned AZO on a substrate [62].…”

Section: Deposition Of Azo Using Rf Magnetron Sputteringmentioning

confidence: 99%

Flexible, Piezoelectric Aluminum-Doped Zinc Oxide Energy Harvesters with Printed Electrodes for Wearable Applications

Suhaimi

Nordin

Ralib

et al. 2022

SWCC

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Aims: Recent advancements in sensing technology and wireless communications have accelerated the development of the Internet of Things (IoT) which promote the usage of wearable sensors. An emerging trend is to develop self-sustainable wearable devices, thus eliminating the necessity of the user to carry bulky batteries. In this work, the development of a flexible piezoelectric energy harvester that is capable of harvesting energy from low frequency vibrations is presented. The target application of this energy harvester is for usage in smart shoes. Objectives: The objectives of this research is to design, fabricate and test an energy harvester on PET substrate using Aluminum Zinc Oxide as its piezoelectric layer. Methods: The energy harvester was designed as a cantilever structure using PET/AZO/Ag layers in d33 mode which can generate large output voltages with small displacements. The electrodes were designed as an interdigitated structure in which two significant design parameters were chosen, namely the effect of gap between electrodes, g and number of interdigital electrodes (IDE) pairs, N to the output voltage and resonant frequency. Results: The sputtered AZO on PET showed c-axis orientation at 002 peak with 2 values of 34.45° which indicates piezoelectric behaviour. The silver IDE pairs were screen-printed on the AZO thin film. Functionality of the device as an energy harvester was demonstrated by testing it using a shaker. The energy harvester was capable of generating 0.867 Vrms output voltage when actuated at 49.6 Hz vibrations. Conclusion: This indicates that the AZO thin films with printed silver electrodes can be used as flexible, d33 energy harvesters.

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Section: Deposition Of Azo Using Rf Magnetron Sputteringmentioning

confidence: 99%

Flexible, Piezoelectric Aluminum-Doped Zinc Oxide Energy Harvesters with Printed Electrodes for Wearable Applications

Suhaimi

Nordin

Ralib

et al. 2022

SWCC

View full text Add to dashboard Cite

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“…It provides a straightforward analysis method that is easy to validate, comprehend, and communicate. Simulationmodelling can offer valuable solutions across industries and disciplines by providing insight into complex systems [37][38][39].…”

Section: Introductionmentioning

confidence: 99%

Computational fluid dynamics-based PDMS-graphene triboelectric nanogenerator ‘PG-TENG’ blue energy harvester

Memon,

Abro

2023

Eng. Res. Express

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Developing cost-effective and efficient energy harvesting technologies is critical with the rising demand for clean and sustainable energy. In this research paper we presents a CFD-based study on a PDMS-Graphene Triboelectric Nanogenerator (PG-TENG) for blue energy harvesting. Our study focuses on the vertical (contact-separation) mode of the PG-TENG and investigates the effect of TENG’s varying size on its electrical output performance. To optimize the properties and performance of the PG-TENG system, we used COMSOL Multiphysics for mathematical-modeling and simulations. The outcomes show that the varying size of the PG-TENG significantly impacts its electrical output capabilities, with larger PG-TENGs exhibiting higher current and voltage outputs. Moreover, we compared our outcomes to other studies on graphene-based TENGs and highlighted the advantages of our PG-TENG in terms of durability, performance, and mechanical stability. Our research contributes to the field of blue energy generation by providing insights into the design and optimization of PG-TENGs for low-cost, effective, and efficient energy harvester devices.

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Optimization of Substrate Layer Material and Its Mechanical Properties for Piezoelectric Cantilever Energy Harvesting System

Kumar

Singh

2021

Advcd Theory and Sims

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A cantilever piezoelectric energy harvester (PEH) is a popular choice to harvest energy for applications with natural or unnatural vibrations. Other than the choice of piezoelectric material, the substrate layer material also plays an important role to increase the energy harvesting in PEH. Earlier researches have emphasized on selecting a few substrate materials than all available in literature. However, we argue that the choice of the substrate material and its mechanical properties depend on the design of the PEH. We establish this fact by designing 20 different PEH models by varying the size of cantilever, substrate layer thickness, and types of the piezoelectric materials. These models are simulated in COMSOL with every known substrate material to select the best substrate material. We also propose a greedy approach to further increase the energy harvesting by optimizing the mechanical properties of the best substrate material. In all models, the best substrate material harvests at least 2× more energy. The greedy approach increases energy harvesting in almost 50% of the models. Some of the substrate materials with optimized mechanical properties are reported in literature, however, this research opens up a discussion to manufacture new substrate materials to increase energy harvesting in PEH.

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Design and Analysis of MEMS Based Aluminum Nitride (AlN), Lithium Niobate (LiNbO<sub>3</sub>) and Zinc Oxide (ZnO) Cantilever with Different Substrate Materials for Piezoelectric Vibration Energy Harvesters Using COMSOL Multiphysics Software

Cited by 9 publications

References 30 publications

Flexible, Piezoelectric Aluminum-Doped Zinc Oxide Energy Harvesters with Printed Electrodes for Wearable Applications

Flexible, Piezoelectric Aluminum-Doped Zinc Oxide Energy Harvesters with Printed Electrodes for Wearable Applications

Computational fluid dynamics-based PDMS-graphene triboelectric nanogenerator ‘PG-TENG’ blue energy harvester

Optimization of Substrate Layer Material and Its Mechanical Properties for Piezoelectric Cantilever Energy Harvesting System

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