Design and Analysis of MEMS Comb Drive Capacitive Accelerometer for SHM and Seismic Applications

Kavitha, S.; Daniel, R. Joseph; Sumangala, K.

doi:10.1016/j.measurement.2016.07.029

Cited by 66 publications

(34 citation statements)

References 14 publications

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“…High sensitivity and a low noise floor can be achieved by simply designing the accelerometers for low bandwidth, since the sensitivity is inversely proportional to the square of the natural frequency. Based on this principle, low frequency piezoresistive and capacitive micro accelerometers exclusively meant for structural health monitoring applications have been designed in previous reports [15][16][17]. The aim of this work is to develop guidelines for the design and manufacture of piezoelectric accelerometers for structural health monitoring.…”

Section: E T E T E E T T T T T T D E T E Tmentioning

confidence: 99%

“…should be the average of V in (x) over the length of the piezoelectric layer, L. This can be mathematically written as (16) Therefore, solving equation (16), we get the average induced voltage for cantilever geometries examined in this study. V in avg is obtained as (17) Here, F is the force per unit length of the beam.…”

Section: Trans Electrmentioning

confidence: 99%

Section: Frequency Response Analysismentioning

confidence: 99%

“…In order to test this argument, the resonant frequency of the piezoelectric accelerometers was kept at 100 Hz in this design. The simple mass-spring system obeys a second order differential equation, as given by [15][16][17]. (29) where m is the inertial mass, k is the spring constant (N/m), b is the damping coefficient (N-s/m) or the damping factor, and a is the acceleration due to external force F. Solving this equation (29), the mechanical transfer function from an acceleration to displacement of the mass is obtained as (30) The frequency response of this system can be written as In the design of the piezoelectric accelerometer,an optimal damping factor of 0.7 is preferable to achieve maximum bandwidth.…”

Section: Frequency Response Analysismentioning

confidence: 99%

“…Elasticity matrix (odering : xx, yy, zz, yz, xz, xy) is ional to the more strabandwidth er sensitivs reducing follows the t this argulerometers ring system [15][16][17]. (29) t (N/m), b ctor, and a is equation leration to (30) n as (31) t (b) of the l damping an optimal um bandnd the top ed film air ned by setcan be calg (32) can be ex- (33) air gap bethe length .…”

Section: Materials Propertiesmentioning

confidence: 99%

See 4 more Smart Citations

A Simple Analytical Model for MEMS Cantilever Beam Piezoelectric Accelerometer and High Sensitivity Design for SHM (structural health monitoring) Applications

Raaja¹,

Rathnasami²,

Sumangala³

2017

Transactions on Electrical and Electronic Materials

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Cantilever beam MEMS piezoelectric accelerometers are the simplest and most widely used accelerometer structure. This paper discusses the design of a piezoelectric accelerometer exclusively for SHM applications. While such accelerometers need to operate at a lower frequency range, they also need to possess high sensitivity and low noise floor. The availability of a simple model for deflection, charge, and voltage sensitivities will make the accelerometer design procedure less cumbersome. However, a review of the open literature suggests that such a model has not yet been proposed. In addition, previous works either depended on FEM analysis or only reported on the fabrication and characterization of piezoelectric accelerometers. Hence, this paper presents, for the first time, a simple analytical model developed for the deflection, induced voltage, and charge sensitivity of a cantilever beam piezoelectric accelerometer.The model is then verified using FEM analysis for a range of different cases. Further, the model was validated by comparing the induced voltages of an accelerometer estimated using this model with experimental voltages measured in the accelerometer after fabrication. Subsequently, the design of an accelerometer is demonstrated for SHM applications using the analytical model developed in this work. The designed accelerometer has 60 mV/g voltage sensitivity and 2.4 pC/g charge sensitivity, which are relatively high values compared to those of the piezoresistive and capacitive accelerometers for SHM applications reported earlier.

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Section: E T E T E E T T T T T T D E T E Tmentioning

confidence: 99%

Section: Trans Electrmentioning

confidence: 99%

Section: Frequency Response Analysismentioning

confidence: 99%