Design and applications of MEMS flow sensors: A review

Ejeian, Fatemeh; Azadi, Shohreh; Razmjou, Amir; Orooji, Yasin; Kottapalli, Ajay Giri Prakash; Warkiani, Majid Ebrahimi; Asadnia, Mohsen

doi:10.1016/j.sna.2019.06.020

Cited by 300 publications

(139 citation statements)

References 184 publications

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“…[ 1–6 ] Piezoresistive sensors, one of the main types of sensors, change their resistance in response to mechanical deformation and have demonstrated a number of applications in monitoring strain, [ 4–8 ] pressure, [ 6,7,9 ] flow, [ 10–12 ] and temperature. [ 4,13,14 ] To meet the requirements for both human motion detection and biosafety, flexible sensors should be biocompatible. In this regard, different types of elastomers such as polydimethylsiloxane (PDMS) or hydrogels such as polyvinyl alcohol (PVA) hydrogels have been extensively used as the flexible substrate/matrix.…”

Section: Introductionmentioning

confidence: 99%

Biocompatible and Highly Stretchable PVA/AgNWs Hydrogel Strain Sensors for Human Motion Detection

Azadi

Peng

Moshizi

et al. 2020

Adv Materials Technologies

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113

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Hydrogel‐based strain sensors have attracted considerable interest for applications such as skin‐like electronics for human motion detection, soft robotics, and human–machine interfaces. However, fabrication of hydrogel strain sensors with desirable mechanical and piezoresistive properties is still challenging. Herein, a biocompatible hydrogel sensor is presented, which is made of polyvinyl alcohol (PVA) nanocomposite with high stretchability up to 500% strain, high mechanical strength of 900 kPa, and electrical conductivity (1.85 S m‐1) comparable to human skin. The hydrogel sensors demonstrate excellent linearity in the whole detection range and great durability under cyclic loading with low hysteresis of 7%. These excellent properties are believed to be contributed by a new bilayer structural design, i.e., a thin, conductive hybrid layer of PVA/silver nanowires (AgNWs) deposited on a pure strong PVA substrate. PVA solution of high concentration is used to fabricate the substrate while the top layer consists of dilute PVA solution so that high content of AgNWs can be dispersed to achieve high electrical conductivity. Together with a rapid response time (0.32 s) and biocompatibility, this new sensor offers great potential as a wearable sensor for epidermal sensing applications, e.g., detecting human joint and muscle movements.

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Section: Introductionmentioning

confidence: 99%

Biocompatible and Highly Stretchable PVA/AgNWs Hydrogel Strain Sensors for Human Motion Detection

Azadi

Peng

Moshizi

et al. 2020

Adv Materials Technologies

Self Cite

113

View full text Add to dashboard Cite

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“…Q clamp is the quality factor for the energy loss at the clamping point (Hao et al, 2003), Q TED is the quality factor for the thermoelastic damping (Zener, 1938) in the cantilever itself and Q fluid is the quality factor for the viscous dissipation by the surrounding fluid. For the cantilevers used in this work, the viscous damping dominates.…”

Section: Basic Equations For Resonance Behaviourmentioning

confidence: 99%

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Stauffenberg

Durstewitz

Hofmann

et al. 2020

J. Sens. Sens. Syst.

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Abstract. Microcantilevers offer a wide range of applications in sensor and measurement technology. In this work cantilever sensors are used as flow sensors. Most conventional flow sensors are often only calibrated for one type of gas and allow an analysis of gas mixtures only with increased effort. The sensor used here is a cantilever positioned vertically in the flow channel. It is possible to operate the sensor in dynamic and static mode. In the dynamic mode the cantilever is oscillating. Resonance frequency, resonance amplitude and phase are measured. In static mode, the bending of the cantilever is registered. The combination of the modes enables the different measured variables to be determined simultaneously. A flow influences the movement behaviour of the sensor, which allows the flow velocity to be deduced. In addition to determining the flow velocity, it is also possible to detect different types of gas. Each medium has certain properties (density and viscosity) which have different effects on the bending of the sensor. As a result, it is possible to measure the mixing ratio of a known binary gas mixture and their flow velocity simultaneously with a single sensor. In this paper this is investigated using the example of the air–carbon-dioxide mixture.

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“…Recently, many researchers have developed inorganic copolymer piezoelectric materials such as poly(vinylidene fluoride-trifluoroethylene) [P(VDF-TrFE)], chlorotrifluoroethylene [P(VDF-CTFE)], and hexafluoropropylene [P(VDF-CTFE)], which are excellent candidates of piezoelectric and dielectric 2 of 19 materials for a micro-electro mechanical system [MEMS] [19], microsensor [20], nanogenerator [21], and energy harvesting [22]. But the copolymer is quite expensive [23].…”

Section: Introductionmentioning

confidence: 99%

Using Annealing Treatment on Fabrication Ionic Liquid-Based PVDF Films

et al. 2020

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In this study, a simple method to obtain pure β-phase directly from the melt process is proposed. A series of PVDF and ionic liquid (IL) was prepared by a solvent casting method with appropriate associated with the subsequent annealing treatment. IL plays a role of filler, which can create strong electrostatic interaction with PVDF matrix and directly induce β-phase crystallization on the PVDF during the melt. PVDF film sample is immersed in hot water for annealing treatment at different temperatures (25 °C to 70 °C). We found that annealing in high temperatures especially can not only increase more IL inserted into the amorphous region of polymer matrix to make more phase transformation, but also accelerate IL removal. Characteristics and performance of the PVDF films were investigated by use of FTIR, XRD, SEM, and AFM. Piezoelectric coefficient d33 as well as d31, degree of crystallinity, and sensitivity are measured in experiment to verify the performance of PVDF film.

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Design and applications of MEMS flow sensors: A review

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Cited by 300 publications

References 184 publications

Biocompatible and Highly Stretchable PVA/AgNWs Hydrogel Strain Sensors for Human Motion Detection

Biocompatible and Highly Stretchable PVA/AgNWs Hydrogel Strain Sensors for Human Motion Detection

Determination of the mixing ratio of a flowing gas mixture with self-actuated microcantilevers

Using Annealing Treatment on Fabrication Ionic Liquid-Based PVDF Films

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