Design and characterization of a MEMS piezoelectric acoustic sensor with the enhanced signal-to-noise ratio

Rahaman, Ashiqur; Park, Chung Hyuk; Kim, Byungki

doi:10.1016/j.sna.2020.112087

Cited by 46 publications

(28 citation statements)

References 26 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The signal-to-noise ratio and location distance are improved. Rahaman et al [80] used AlN and D33 as piezoelectric sensors, which have the characteristics of high signal-to-noise ratio, high sensitivity, low noise, and linearity; Arumbu et al [81] established the secondorder quadratic model of acoustic Doppler velocimeter to measure the acoustic signal, which represents the continuous model of signal-to-noise ratio and determines the optimal acoustic receiving area. (5) The non-contact pipe excitation approach to radiate the sound wave into the pipeline has been studied.…”

Section: Figurementioning

confidence: 99%

Current Trends and Perspectives of Detection and Location for Buried Non-Metallic Pipelines

Zhang

Tian

et al. 2021

Chin. J. Mech. Eng.

View full text Add to dashboard Cite

Buried pipelines are an essential component of the urban infrastructure of modern cities. Traditional buried pipes are mainly made of metal materials. With the development of material science and technology in recent years, non-metallic pipes, such as plastic pipes, ceramic pipes, and concrete pipes, are increasingly taking the place of pipes made from metal in various pipeline networks such as water supply, drainage, heat, industry, oil, and gas. The location technologies for the location of the buried metal pipeline have become mature, but detection and location technologies for the non-metallic pipelines are still developing. In this paper, current trends and future perspectives of detection and location of buried non-metallic pipelines are summarized. Initially, this paper reviews and analyzes electromagnetic induction technologies, electromagnetic wave technologies, and other physics-based technologies. It then focuses on acoustic detection and location technologies, and finally introduces emerging technologies. Then the technical characteristics of each detection and location method have been compared, with their strengths and weaknesses identified. The current trends and future perspectives of each buried non-metallic pipeline detection and location technology have also been defined. Finally, some suggestions for the future development of buried non-metallic pipeline detection and location technologies are provided.

show abstract

Section: Figurementioning

confidence: 99%

Current Trends and Perspectives of Detection and Location for Buried Non-Metallic Pipelines

Zhang

Tian

et al. 2021

Chin. J. Mech. Eng.

View full text Add to dashboard Cite

show abstract

“…They can achieve accurate directional response relying on many different techniques and configurations and appropriate signal processing schemes [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ]. More recently, the reduced size, lightweight, and lower power requirements of MEMS-based directional acoustic sensors fostered interest in their development [ 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 ]. Furthermore, the possibility of sound source localization by deploying a set of networked sensors make them even more attractive.…”

Section: Introductionmentioning

confidence: 99%

“…Furthermore, the possibility of sound source localization by deploying a set of networked sensors make them even more attractive. Most of the MEMS directional sensor designs are based on the configuration of the hearing mechanism of the Ormia ochracea fly [ 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 ]. The fly’s hearing organ evolved to employ unique mechanically coupled eardrums that results in remarkable directional sound sensitivity, regardless of their small subwavelength eardrum separation [ 39 , 40 ].…”

Section: Introductionmentioning

confidence: 99%

Dual Band MEMS Directional Acoustic Sensor for Near Resonance Operation

Alves

Rabelo

Karunasiri

2022

Sensors

View full text Add to dashboard Cite

In this paper, we report on the design and characterization of a microelectromechanical systems (MEMS) directional sensor inspired by the tympana configuration of the parasitic fly Ormia ochracea. The sensor is meant to be operated at resonance and act as a natural filter for the undesirable frequency bands. By means of breaking the symmetry of a pair of coupled bridged membranes, two independent bending vibrational modes can be excited. The electronic output, obtained by the transduction of the vibration to differential capacitance and then voltage through charge amplifiers, can be manipulated to tailor the frequency response of the sensor. Four different frequency characteristics were demonstrated. The sensor exhibits, at resonance, mechanical sensitivity around 6 μm/Pa and electrical sensitivity around 13 V/Pa. The noise was thoroughly characterized, and it was found that the sensor die, rather than the fundamental vibration, induces the predominant part of the noise. The computed average signal-to-noise (SNR) ratio in the pass band is about 91 dB. This result, in combination with an accurate dipole-like directional response, indicates that this type of directional sensor can be designed to exhibit high SNR and selectable frequency responses demanded by different applications.

show abstract

“…In recent years, many researchers have studied MEMS microphones because of their great performance, such as high sensitivities, low power consumption, suitable frequency responses, stability, and reliability, and several MEMS microphones have been developed including capacitance type [2][3][4][5], piezoelectric type [6][7][8][9] and piezoresistive type [10][11][12]. For example, Ganji et al [4] reported a MEMS capacitive microphone using a perforated diaphragm supported by Z-shape arms with a high open sensitivity of 2.46 mV/Pa, and a small size of 0.3 mm × 0.3 mm; Segovia-Fernandez et al [6] reported a MEMS piezoelectric acoustic sensor with a sensitivity of 0.68 mV/Pa; Rahaman et al [7] reported a MEMS piezoelectric acoustic sensor with very high signal-to-noise ratio; Lhermet et al [10] first reported a piezoresistive microphone based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges with a small size and high sensitivity of 0.1 mV/Pa. Although those microphones fit well with MEMS technology and provide a good performance, the capacitive microphone has the problem that the capacitive plate is easy to absorb and adhere to [2], and the piezoelectric microphone has the problems of poor anti-interference ability and low signal-to-noise ratio, and the piezoresistive microphone has the problem of low sensitivity [8].…”

Section: Introductionmentioning

confidence: 99%

“…small size of 0.3 mm × 0.3 mm; Segovia-Fernandez et al [6] reported a MEMS piezoelectric acoustic sensor with a sensitivity of 0.68 mV/Pa; Rahaman et al [7] reported a MEMS piezoelectric acoustic sensor with very high signal-to-noise ratio; Lhermet et al [10] first reported a piezoresistive microphone based on an in-plane deflecting micro-diaphragm and piezoresistive nano-gauges with a small size and high sensitivity of 0.1 mV/Pa. Although those microphones fit well with MEMS technology and provide a good performance, the capacitive microphone has the problem that the capacitive plate is easy to absorb and adhere to [2], and the piezoelectric microphone has the problems of poor antiinterference ability and low signal-to-noise ratio, and the piezoresistive microphone has the problem of low sensitivity [8].…”

Section: Introductionmentioning

confidence: 99%

Design and Optimization of a BAW Microphone Sensor

Guo

Liu

et al. 2022

Micromachines

View full text Add to dashboard Cite

A wind tunnel experiment is an important way and effective method to research the generation mechanism of aerodynamic noise and verify aerodynamic noise reduction technology. Acoustic measurement is an important part of wind tunnel experiments, and the microphone is the core device in an aerodynamic acoustic measurement system. Aiming at the problem of low sound pressure (several Pa) and the small measuring surface of an experimental model in a wind tunnel experiment, a microphone sensor head with high sensitivity and small volume, based on film bulk acoustic resonator (FBAR), is presented and optimized in this work. The FBARs used as a transducer are located at the edge of a diaphragm for sound pressure level detection. A multi-scale and multi-physical field coupling analysis model of the microphone is established. To improve the performance of the microphone, the structural design parameters of the FBAR and the diaphragm are optimized by simulation. The research results show that the microphone has a small size, good sensitivity, and linearity. The sensor head size is less than 1 mm × 1 mm, the sensitivity is about 400 Hz/Pa when the sensor worked at the first-order resonance frequency, and the linearity is better than 1%.

show abstract

Design and characterization of a MEMS piezoelectric acoustic sensor with the enhanced signal-to-noise ratio

Cited by 46 publications

References 26 publications

Current Trends and Perspectives of Detection and Location for Buried Non-Metallic Pipelines

Current Trends and Perspectives of Detection and Location for Buried Non-Metallic Pipelines

Dual Band MEMS Directional Acoustic Sensor for Near Resonance Operation

Design and Optimization of a BAW Microphone Sensor

Contact Info

Product

Resources

About