Stroke, spinal cord injuries, or aging can lead to muscle weakness that can make a person's life sedentary, either temporarily or permanently. Such persons need to be motivated to break their sedentary postures and attempt independent motion. A key motivator in this aspect is the ability to easily transition from seated to standing posture. If this sit-to-stand transition (STSt) is easy, it will encourage further mobility. A soft wearable device that can assist the STSt, would fill this need perfectly. The device would need to be able to seamlessly assist during STSt while being unobtrusive during being seated. A key limitation that is currently holding back the development of soft exosuits in STSt-assist is the lack of low-profile soft actuators with high strain rate and force-to-weight ratio. Hence, we propose a novel lowprofile vacuum actuator (LPVAc) with an integrated inductive displacement sensor that, can be rapidly fabricated, is lightweight (14 g), and can provide high strain (65%) and a high force-to-weight ratio (285 times self-weight). The proposed actuator comprises a low-profile spring encased within a low-density polyethylene film with rapid vacuum actuation and passive quick return. The proposed inductive sensor has a sensitivity of 0.0022 µH/mm and the hysteresis is below 1.5% with an overall absolute average error percentage of 5.24%. The performance of the proposed integrated sensor in displacement control of the LPVAc is experimentally evaluated. The proposed actuator is integrated into a novel mono-articular STStassist exosuit for preliminary testing. Surface electromyography measurements of the gluteus maximus muscles during STSt indicate a mean muscle activity reduction of 45%. This supports the potential use of the proposed actuator in STSt-assist.