2007
DOI: 10.1109/jstqe.2007.893561
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Design and Characterization of MEMS Micromirrors for Ion-Trap Quantum Computation

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Cited by 21 publications
(20 citation statements)
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“…Entanglement between non-local registers can be generated probabilistically [3,31,32]. Devices of optical micro-eletro-mechanical systems (MEMS) [38] can efficiently route photons and couple arbitrary pair of registers. Detector array can simultaneously generate entanglement for many pairs of registers.…”
Section: Quantum Register and Experimental Implementationsmentioning
confidence: 99%
“…Entanglement between non-local registers can be generated probabilistically [3,31,32]. Devices of optical micro-eletro-mechanical systems (MEMS) [38] can efficiently route photons and couple arbitrary pair of registers. Detector array can simultaneously generate entanglement for many pairs of registers.…”
Section: Quantum Register and Experimental Implementationsmentioning
confidence: 99%
“…The mirror design consists of a circular mirror plate rotating about 2 torsional springs (Fig. 2) [16]. Tilt is induced by electrostatic actuation from a voltage applied between the grounded mirror plate and underlying electrodes.…”
Section: Mems Mirrorsmentioning
confidence: 99%
“…In order to achieve the targeted transition speed, the settling time of the mirror's step response is minimized by increasing ω R while maintaining near critical damping. Maximizing beam steering speed while meeting system requirements is a complex optimization process [16] due to physical limitations on available torsional stiffness κ and control voltage [17] as well as the strong dependence of the damping ratio ζ on the mirror radius and the air gap under the mirror plate. We have found that mirrors with a radius close to 75 µm and a gap of 1.25 µm give the best compromise of resonant frequency and proper damping.…”
Section: Mems Mirrorsmentioning
confidence: 99%
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“…Entanglement between remote registers can be generated probabilistically [22,29]. Optical MEMS devices [30] can efficiently route photons and couple arbitrary pair of registers. Detector array can simultaneously generate entanglement for many pairs of registers.…”
mentioning
confidence: 99%