Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Guo, Zhiyong; Tian, Yanling; Liu, C.; Wang, F.; Liu, X.; Shirinzadeh, Bijan; Zhang, D.

doi:10.1016/j.rcim.2014.10.003

Cited by 86 publications

(39 citation statements)

References 27 publications

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“…The nominal maximal displacement of these specific actuators is 15 µm at the driving voltage of 100 V. After assemble the piezoelectric, the plane displacement of the flexure-based mechanism can reach 12.74 µm, 12.22 µm in the x and y direction, respectively, the maximal rotation angle in clockwise and anticlockwise are 0.0088° and 0.0103°, respectively, the first resonant frequency is 790 HZ in the θ Z direction. More detailed information about the positioning mechanism can reference our previous work [31]. The actuators are driven by a piezoelectric amplifier (E-505.00, PI, Germany) that receives command signals from the I/O interface of a dSPACE DS1103 R&D control board, on which the newly developed control methodology is implemented with a sampling rate of 10 kHz.…”

Section: -Dof Flexure-based Mechanismmentioning

confidence: 99%

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

Guo

Tian

Liu

et al. 2015

Sensors and Actuators A: Physical

Self Cite

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Copies of full items can be used for personal research or study, educational, or not-forprofit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. Abstract ： A modified Prandtl-Ishlinskii (P-I) hysteresis model is developed to form the feedforward controller for a 3-DOF flexure-based mechanism. To improve the control accuracy of the P-I hysteresis model, a hybrid structure that includes backlash operators, dead-zone operators and a cubic polynomial function is proposed. Both the rate-dependent hysteresis modeling and adaptive dead-zone thresholds selection method are investigated. System identification was used to obtain the parameters of the newly-developed hysteresis model. Closed-loop control was added to reduce the influence from external disturbances such as vibration and noise, leading to a combined feedforward/feedback control strategy. The cross-axis coupling motion of the 3-DOF flexure-based mechanism has been explored using the established controller. Accordingly, a decoupling feedforward/feedback controller is proposed and implemented to compensate the coupled motion of the moving platform. Experimental tests are reported to examine the tracking capability of the whole system and features of the controller. It is demonstrated that the proposed decoupling control methodology can distinctly reduce the coupling motion of the moving platform and thus improve the positioning accuracy and trajectory tracking capability.

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Section: -Dof Flexure-based Mechanismmentioning

confidence: 99%

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

Guo

Tian

Liu

et al. 2015

Sensors and Actuators A: Physical

Self Cite

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“…Piezoelectric devices are preferable when solving this type of problems because of the high precision, quick response, and low cost. Such advantages of piezoelectric devices are applicable in different fields, where nanometric scale resolution is required as, for example, in microscopes, laser systems, precision positioning systems [1,2,3,4], etc.…”

Section: Introductionmentioning

confidence: 99%

“…The stage uses piezoelectric actuators, as well as translation and rotation mechanisms to ensure proper operation. The system design, where high accuracy is achieved by using components based on flexure hinges and piezoelectric actuators, is efficient enough [4,5,6,7]. However, the main drawback of such systems is a complex structure and many components that must be controlled.…”

Section: Introductionmentioning

confidence: 99%

Single Cylinder-Type Piezoelectric Actuator with Two Active Kinematic Pairs

Bansevicius

Janutėnaitė-Bogdanienė

Jurenas

et al. 2018

Micromachines

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There is an ever-increasing demand for small-size, low-cost, and high-precision positioning systems. Therefore, investigation in this field is performed to search for various solutions that can meet technical requirements of precise multi-degree-of-freedom (DOF) positioning systems. This paper presents a new design of a piezoelectric cylindrical actuator with two active kinematic pairs. This means that a single actuator is used to create vibrations that are transformed into the rotation of the sphere located on the top of the cylinder and at the same time ensure movement of the piezoelectric cylinder on the plane. Numerical and experimental investigations of the piezoelectric cylinder have been performed. A mathematical model of contacting force control was developed to solve the problem of positioning of the rotor when it needs to be rotated or moved according to a specific motion trajectory. The numerical simulation included harmonic response analysis of the actuator to analyze the trajectories of the contact points motion. A prototype actuator has been manufactured and tested. Obtained results confirmed that such a device is suitable for both positioning and movement of the actuator in the plane.

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“…Guo proposed a XYθ z stage with the parallelogram decoupling mechanisms [33]. In these developed mechanisms, a series of the notch-type hinges have been adopted as a guide mechanism.…”

Section: Introductionmentioning

confidence: 99%

Modeling and tracking control of a novel XYθz stage

et al. 2017

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A XYθ z stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining (WEDM) technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator.Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.

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Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Cited by 86 publications

References 27 publications

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

An inverse Prandtl–Ishlinskii model based decoupling control methodology for a 3-DOF flexure-based mechanism

Single Cylinder-Type Piezoelectric Actuator with Two Active Kinematic Pairs

Modeling and tracking control of a novel XYθz stage

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