Design and Developing a Linear Tables by Applying Piezoelectric Inchworm Moves

Abstract

This paper designed and developed a nano-positioning stage with linear movement as an essential part of the development of a micro-lathe. This stage uses an inchworm movement that drives with three high resolution piezoelectric that provides an unlimited movement range with high resolution in the nano range. This paper firstly discusses the table movement’s mechanism and design. Then, with unitizing finite element analysis and mathematical modeling, the outputs such as resolution, velocity, and power are analyzed according to input parameters such as voltage and frequency. Results show that the accuracy and rigidity of this table in comparison with other nano-positioning tables prototypes is higher.