Design and development of passive and active RF Components using MEMS technology

Koul, Shiban K.

doi:10.1109/iwpsd.2007.4472604

Cited by 3 publications

(3 citation statements)

References 6 publications

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“…The prototype will be measured using E8362B Agilent network analyzer. A composite LPF has been designed using microstrip line and fabricated by using MEMS technology [22][23]. The sharpness of the cutoff from the simulations is larger compared to the fabricated prototype composite LPF.…”

Section: Ads Results and Simulationsmentioning

confidence: 99%

“…MEMS technology is capable of producing devices that have the dimensions in the sub-millimeter range and enable the production of better filter frequency response which will fulfill the design requirement. MEMS technology [18][19][20][21][22][23] can even integrate these Composite low pass filters to replace the low-impedance transmission line in a stepped impedance filter to be included in multi-chip packages or in an integrated circuit form.…”

Section: Introductionmentioning

confidence: 99%

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Design of Compact Composite Microstrip Low Pass Filter Using MEMS Technology

Fang

Hassan

Malek

et al. 2015

AMM

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This paper presents the design technique of a compact composite microstrip filter operating at ultra high frequency (UHF) band and its fabrication using micro-electro mechanical system MEMS technology. The fringing compensation method is applied into the design of the microstrip line transformation from lumped element. The filter lumped circuits and microstrip line circuit were designed and simulated using Advanced Design Software (ADS) and fabricated on silicon substrates to obtain the best filter characteristic based on S-parameter. The measured and simulated results have achieved a good agreement within the frequency of interest. This shows that the fringing compensation method of transforming lumped element into microstrip line is able to solve the conventional design of complexity size of circuit of composite low pass filter (LPF) into microstrip line. The proposed filter design can replace the conventional filters in wireless communication as they offer better performance at lower cost in the RF microwave communication applications.

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Section: Ads Results and Simulationsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design of Compact Composite Microstrip Low Pass Filter Using MEMS Technology

Fang

Hassan

Malek

et al. 2015

AMM

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“…However such methods tend to be of quite limited versatility and the trend now is toward selective removal of substrate in the vicinity of the antenna. This can be done by, for example, bulk micromachining an air gap between the planar antenna (usually a conducting patch) and the ground plane (Koul, 2007). The advantages of doing so are as follows:…”

Section: Introductionmentioning

confidence: 99%

Micromachined High Gain Wideband Antennas for Wireless Communications

Pavuluri¹,

Wang²,

Sangster³

2010

Mobile and Wireless Communications Network Layer and Circuit Level Design

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Performance Improvement of Aperture Coupled MSA through Si Micromachining

Soni

Singh

Rathi

et al. 2022

International Journal of Circuits, Systems and Signal Processing

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In recent times rectangular patch antenna design has become the most innovative and popular subject due to its advantages, such as being lightweight, conformal, ease to fabricate, low cost and small size. In this paper design of aperture coupled microstrip patch antenna (MSA) on high index semiconductor material coupled with micromachining technique for performance enhancement is discussed. The performance in terms of return loss bandwidth, gain, cross-polarization and antenna efficiency is compared with standard aperture coupled antenna. Micromachining underneath of the patch helps in to reduce the effective dielectric constant, which is desirable for the radiation characteristics of the patch antenna. Improvement 36 percent and 18 percent in return loss bandwidth and gain respectively achieved using micromachined aperture coupled feed patch, which is due to the reduction in losses, suppression of surface waves and substrate modes. In this article along with design, fabrication aspects on Si substrate using MEMS process also discussed. Presented antenna design is proposed antenna can be useful in smart antenna arrays suitable in satellite, radar communication applications. Two topologies at X-band are fabricated and comparison between aperture coupled and micromachined aperture coupled are presented. Index Terms—Microstrip Patch Antenna, Aperture Coupled, Micromachining, High Resistivity Silicon

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Design and development of passive and active RF Components using MEMS technology

Cited by 3 publications

References 6 publications

Design of Compact Composite Microstrip Low Pass Filter Using MEMS Technology

Design of Compact Composite Microstrip Low Pass Filter Using MEMS Technology

Micromachined High Gain Wideband Antennas for Wireless Communications

Performance Improvement of Aperture Coupled MSA through Si Micromachining

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